Circulating Liquid Flow Measuring Device
A flow measurement device and circulating liquid technology, which is applied in the field of measurement, can solve the problems of low measurement accuracy and achieve the effect of improving measurement accuracy
Active Publication Date: 2017-05-17
BEIJING INST OF OPTO-ELECTRONIC TECH
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Problems solved by technology
[0005] The invention provides a circulating liquid flow measurement device to overcome the technical problem of low measurement accuracy in the prior art
Method used
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Embodiment Construction
[0030] figure 1 It is a structural schematic diagram of Embodiment 1 of the circulating liquid flow measurement device of the present invention. like figure 1 As shown, the device of this embodiment may include: a laser measuring device 1, a load cooling device 2;
[0031] The load cooling device 1 includes: a liquid inlet pipe 201, a liquid inlet buffer 202, a liquid inlet reflective floating pad 203, a load 204, a liquid outlet buffer 205, a liquid outlet reflective floating pad 206, and a liquid outlet pipe 207; wherein,
[0032] The liquid inlet pipe 201 is connected with the liquid inlet buffer 202;
[0033] The liquid inlet buffer 202 is connected to the load 204 through the load liquid inlet;
[0034] The load 204 is connected to the liquid outlet buffer 205 through the load liquid outlet;
[0035] The liquid outlet buffer 205 is connected to the liquid outlet pipe 207;
[0036] The liquid-inlet reflective floating pad 203 is arranged in the liquid-inlet buffer 202...
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The invention discloses a flow rate measuring device for circulating liquid. The device comprises a laser measuring device and a load cooling device; the load cooling device comprises a liquid inlet pipe, a liquid inlet buffering device, a liquid inlet reflecting floating cushion, a load, a liquid outlet buffering device, a liquid outlet reflecting floating cushion and a liquid outlet pipe; the liquid inlet pipe is connected with the liquid inlet buffering device; the liquid inlet buffering device is connected with the load through a load liquid inlet; the load is connected with the liquid outlet buffering device through a load liquid outlet; the liquid outlet buffering device is connected with the liquid outlet pipe; the liquid inlet reflecting cushion is arranged in the liquid inlet buffering device, and while the liquid outlet reflecting cushion is arranged in the liquid outlet buffering device; the laser measuring device is used for determining the flow rate of the load liquid through the liquid inlet reflecting floating cushion and the liquid outlet reflecting floating cushion. According to the flow rate measuring device for the circulating liquid, the laser measuring device, the liquid inlet reflecting floating cushion and the liquid outlet reflecting floating cushion are used for accurately measuring the height difference between the liquid inlet buffering device and the liquid outlet buffering device, and therefore, the flow rate of liquid flowing through the load can be determined, and as a result, the measuring precision is improved.
Description
technical field [0001] The invention relates to measurement technology, in particular to a circulating liquid flow measurement device. Background technique [0002] Circulating liquid heat dissipation technology is an important cooling method, which is widely used in high-power lasers, laser testing equipment, lithography machines, engines and other equipment that need to eliminate thermal effects. The basic working principle of circulating liquid cooling is that the low-temperature liquid flows through the load to take away the heat in the load, thereby cooling the load. [0003] The temperature of the load is not only related to the temperature of the liquid in the liquid inlet pipe, but also to the flow of the liquid in the load. The greater the flow of liquid in the load, the more heat is taken away by the liquid, and the lower the temperature of the load, and vice versa. In order to accurately control the temperature of the load, it is necessary to accurately measure t...
Claims
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IPC IPC(8): G01F1/37
Inventor 王涛张玉莹陆耀东孙岩李鹏张丽雯王帅
Owner BEIJING INST OF OPTO-ELECTRONIC TECH