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Hybrid wave-front sensing device based on four-light-beam interference

A wavefront sensing, hybrid technology for optical measurement applications

Active Publication Date: 2015-01-14
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the case of a certain number of sub-apertures, it is difficult to accurately measure higher-order aberrations with higher spatial frequencies

Method used

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  • Hybrid wave-front sensing device based on four-light-beam interference
  • Hybrid wave-front sensing device based on four-light-beam interference
  • Hybrid wave-front sensing device based on four-light-beam interference

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Embodiment Construction

[0043] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0044] The design principle of the device of the present invention is: on the basis of traditional area-type wavefront sensing technologies such as Shaker-Hartmann or Hartmann, four light-through holes are set in each sub-aperture of the light wave surface to be measured, Therefore, four beams of coherent light are generated in each sub-aperture, and the wavefront slope and curvature information of the light wave surface to be measured in each sub-aperture is calculated by using the light field intensity distribution of the four-beam interference pattern.

[0045] Such as figure 1 As shown, the wavefront sensor 100 in this specific embodiment includes: including a sub-wavefront element 101, a photoelectric sensor 102, a memory 103 and an arithmetic unit 104; wherein

[0046] Each sub-aperture on the demultiplexing surface element 101 is provid...

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Abstract

The invention provides a hybrid wave-front sensing device based on four-light-beam interference. The sensing device comprises a wave distribution face element, a photoelectric sensor, a memorizer and an operator. Four round light transmitting holes A, B, C and D are formed in each sub-aperture of the wave distribution face element, the circle center of the round light transmitting hole A is located in the center of the corresponding sub-aperture, and the circle centers of the round light transmitting holes B, C and D are evenly distributed on concentric circles of the round light transmitting hole A at intervals by 120 degrees. The photoelectric sensor is used for receiving an interference pattern of a light field formed by incident light waves after the light waves pass the wave distribution face element, and intensity information of the interference pattern is quantified to be a digital image and stored in the memorizer. The operator calculates wave surface phase distribution of the incident light waves in each sub-aperture on the wave distribution face element according to the digital image stored in the memorizer. By the adoption of the device, slope values, curvature values and hybrid curvature values of the wave surface in each sub-aperture in the x direction and the y direction can be acquired, so that high-order aberration is accurately measured.

Description

technical field [0001] The invention relates to an optical wavefront sensing device, in particular to a hybrid wavefront sensing device based on four-beam interference, and belongs to the technical field of optical measurement. Background technique [0002] Optical wavefront sensing usually uses optical measurements to obtain wavefront phase information. Commonly used methods include optical interference, mode-type wavefront sensing, and area-type wavefront sensing. Optical interference usually uses the interference of two or more beams to modulate the wavefront phase of the light to be measured, and calculates the phase information of the light wavefront by using the intensity information of the interference fringes collected by a detector (such as a CCD, etc.). Commonly used optical interference methods include Newtonian interference, Fizet interference, Tyman-Green interference, point diffraction interference, shearing interference, Fabry-Perot interference and so on. M...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02
Inventor 刘克李艳秋
Owner BEIJING INSTITUTE OF TECHNOLOGYGY