Fluid delivery system and method

A fluid and fluid supply technology, applied in the direction of transportation and packaging, container discharge methods, liquid distribution, delivery or transfer devices, etc., can solve problems such as failure, expensive floating sensors, etc.

Active Publication Date: 2015-01-21
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Floating sensors are expensive and have a history of failure

Method used

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  • Fluid delivery system and method
  • Fluid delivery system and method

Examples

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Embodiment Construction

[0029] The present disclosure relates to fluid transfer systems and methods that include a transfer vessel that acts as a pressure buffer between a bulk vessel tank and a process vessel vessel. In some embodiments, the bulk container canister can be transferred to the transfer container under vacuum, thereby eliminating the need for a high pressure rated stainless steel container. The contents transferred to the transfer vessel may then be moved under pressure to the process vessel tank. In other embodiments, the contents of the bulk container tank may be transferred at relatively low pressure to an intermediate transfer container (also referred to herein as a "reservoir"). The substance can then be transferred from the reservoir to a downstream process (eg, tool or process tank) under relatively high pressure.

[0030]In one embodiment, the liquid delivery system uses an intermediate vessel (also referred to herein variously as a "transfer vessel") to transfer fluid from a b...

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Abstract

A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 61 / 602,898, filed February 24, 2012, entitled "Fluid Delivery System and Method," which is hereby incorporated herein in its entirety Reference. technical field [0003] The present disclosure relates to fluid delivery systems and methods. Aspects of the disclosure described hereinafter relate to systems and methods for minimizing entrained gas in fluids, accommodating fluid transfer from a wide variety of fluid containers, and minimizing costs and waste associated with known fluid delivery systems. Although the focus of the present disclosure is primarily on fluid delivery systems and methods for semiconductor applications, the systems and methods disclosed herein are applicable to a broad range of fields. Background technique [0004] Fluid storage and dispensing containers are used in a wide variety of industrial, commercial, and personal ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C9/00B67D7/00F17C7/00H01L21/02
CPCF17C9/00B67D7/0283B67D7/0272B67D7/02B67D7/025B67D7/00F17C7/00
Inventor 乔丹·霍奇斯理查德·D·奇兹姆米切尔·W·麦克费龙唐纳德·D·韦尔格伦·M·汤姆
Owner ENTEGRIS INC
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