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Method for measuring surface profile

A measurement method and technology of surface profile, which can be used in measurement devices, instruments, etc., and can solve problems such as low accuracy

Inactive Publication Date: 2015-02-11
刘杰波
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The main purpose of the present invention is to provide a method for measuring surface profile, aiming at solving the technical problem of relatively low accuracy of existing measuring methods

Method used

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Embodiment Construction

[0039] It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0040] The invention provides a method for measuring surface profile, referring to Figure 1 to Figure 3 , in one embodiment, the measuring method of described surface profile comprises the following steps:

[0041] Step S10 , providing a measuring device, the measuring device includes a measuring device 200 and at least one moving device 400 , and the measuring device 200 is installed on the moving device 400 .

[0042] Specifically, the measuring device 200 is a non-contact position sensor. The moving device 400 drives the measuring device 200 to perform linear motion and curved motion. In this embodiment, the measuring device is a three-coordinate measuring device, the measuring device 200 is fixedly installed on a measuring axis (such as the Z axis), and the measuring device 200 is fixed in the direction of the ...

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Abstract

The invention relates to a method for measuring a surface profile, which comprises the following steps: S10 providing a measuring device which comprises measuring equipment and at least one movement device, wherein the measuring equipment is arranged on the movement device; S20 providing a standard piece with at least one smooth plane; S30 allowing the movement device to drive the measuring equipment to measure the smooth plane of the standard piece according to the preset path so as to obtain correction data; S40 according to the step S30, obtaining the correction data corresponding to all preset paths to generate a data group; S50 providing a workpiece to be measured, selecting the path and measuring the workpiece to be measured to obtain first measuring data; S60 taking the correction data corresponding to the preset path which is matched with the selected path or covering the selected path in the data group, and correcting the correction data into the first measuring data.

Description

technical field [0001] The invention relates to the field of surface profile measurement, in particular to a method for measuring surface profile. Background technique [0002] For the measurement of surface shape or profile measuring devices, the existing general technology mainly focuses on the coordinate accuracy of each axis motion along the axis, and the coordinates of a certain two-axis motion plane or three-axis motion space are consistent with the ideal Correspondence of coordinates, such as using a laser interferometer to measure and calibrate the step length of a certain axis, using a standard plane with a grid or pattern to calibrate the error of plane coordinate positioning, etc., using a three-dimensional standard part and three-axis compound motion to calibrate the three-dimensional space coordinates. Compared with the measurement of ordinary precision, these methods with precise moving parts can already meet the precision requirements, but for the measurement ...

Claims

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Application Information

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IPC IPC(8): G01B21/20
CPCG01B21/20
Inventor 刘杰波
Owner 刘杰波
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