Off-axis parabolic mirror focal length detection device and method

Abstract

An off-axis parabolic mirror focal length detection device comprises a Fizeau interferometer and a standard plane mirror thereof, a five dimension adjusting frame, a compensating ball and a three dimension adjusting frame thereof, a bearing and fixing base plate and a three coordinate measuring machine. The standard plane mirror serves as a light beam output window of the Fizeau interferometer, the top of the five dimension adjusting frame is fixed to a base, and the base is used for fixing an off-axis parabolic mirror to be measured and an auxiliary cylinder; the compensating ball and the three dimension adjusting frame are placed at the focus of the off-axis parabolic mirror; the five dimension adjusting frame, the off-axis parabolic mirror to be measured, the compensating ball and the three dimension adjusting frame thereof are fixed to the bearing and fixing base plate; the Fizeau interferometer is located above the base with the off-axis parabolic mirror to be measured; the three coordinate measuring machine is in other position. By the aid of the device, the focal length of the off-axis parabolic mirror to be measured can be measured accurately, and gaps of the existing technology are filled.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a detection device and a detection method for the focal length of an off-axis parabolic mirror based on a Fizeau interferometer. Background technique [0002] Traditional inspection methods and techniques for optical components have been used for decades. Optical inspection involves the material, caliber, and type of the tested component, as well as testing technology, instruments and equipment. There are many types of components to be tested, including parallel flat plates, spherical surfaces, aspheric surfaces, free-form surfaces, diffraction gratings, cone mirrors, cylindrical lenses, etc. Among the aspheric surfaces, there are special aspheric surfaces such as paraboloids, ellipsoids, hyperboloids and other other aspheric surfaces. The main instruments commonly used in optical inspection can be divided into interferometers, surface profilers, MTF testers, precisio...

AI Technical Summary

Problems solved by technology

Existing detection instruments such as Zygo interferometer, Newton interferometer, 4D interferometer, Tayloy-Hobson, etc. cannot directly detect the focal length of off-axis parabola

[0005] The patent "A detection device and detection method for an off-axis ellipsoidal mirror" (application number: 201310422011.4) filed by the applicant in 2013 is a device for detecting the surface shape of an off-axis ellipsoidal surface, which cannot be realized Focal Length Measurement of Off-Axis Parabolic Mirrors

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