Spraying system and using method thereof

Abstract

The invention discloses a spraying system and a using method thereof. The spraying system comprises multiple cascading spraying members with multiple nozzles, a spraying solution supply system, a spraying solution recovery system and a control system, wherein the control system is used for controlling the spraying solution supply system to supply a spraying solution to a sprayed base plate for spraying at the working stage of the spraying system and controlling the spraying solution recovery system to recover the spraying solution after the spraying operation is ended; the spraying system also comprises a cleaning solution supply system and a liquid waste treatment system; the cleaning solution supply system is used for supplying a cleaning solution to the nozzle of each spraying member for cleaning under the control of the control system; and the liquid waste treatment system is used for discharging cleaned liquid waste under the control of the control system after the cleaning stage is ended. Compared with a conventional spraying system, the cleaning solution supply system and the liquid waste treatment system are additionally arranged, so that the function of fully automatically cleaning the spraying system can be realized, foreign matters in pipelines and the nozzles are effectively removed, and the cleaning efficiency is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a spraying system and a using method thereof. Background technique [0002] At present, the developing equipment and cleaning equipment are collectively referred to as the spray system. Existing sprinkler systems such as figure 1 As shown, it includes: a shower member 001 with a plurality of cascaded arrangements of a plurality of shower heads, ( figure 1 Only three spray components are shown, other spray components are not shown, and the total number of spray components is not limited here), spray liquid supply system, spray liquid recovery system, and control system, wherein the spray The liquid supply system includes a spray liquid supply device 100, a spray liquid circulation tank 002 arranged under other spray components except the primary spray component 001a, communicating with the spray liquid supply device 100 and the final spray component 001c The spray liquid suppl...

AI Technical Summary

Problems solved by technology

[0003] Taking the cleaning equipment in the spray system as an example, the existing cleaning equipment uses deionized water to clean the substrate in the spray component for a long time during the working stage, and the particles and a small amount of organic matter such as photoresist on the surface of the substrate washed away are circulating. During the process of use, they gradually accumulate in the pipeline and nozzle of the cleaning equipment. These foreign substances seriously affect the cleaning ability of the cleaning equipment and cause abnormal quality of the substrate. Therefore, removing foreign substances in the pipeline and nozzle will improve the product yield and Equipment maintenance is very necessary

The existing method for removing foreign objects in the pipelines and nozzles of the sprinkler system is to manually disassemble the pipelines and nozzles, and use the cleaning solution to soak and clean the dirt. Although this method can remove dirt, the operation process is cumbersome and the task In addition, the long-term disassembly of pipelines and nozzles will increase the loss of equipment

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