A high-precision target measurement system and method

A measurement system and high-precision technology, applied in measurement devices, instruments, optical devices, etc., can solve the problem of only collecting two-dimensional data, and achieve the effect of precise control and improved stability

Active Publication Date: 2017-09-26
SUZHOU JUZHEN PHOTOELECTRIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] For this reason, the present invention aims to solve the problem that the existing technology must carry out flipping supplementary measurement during the detection process, and can only collect two-dimensional data, thus proposing a method suitable for the field of target use detection that can realize a measurement after the target is placed. Complete, no need to turn over, and realize the high-precision target measurement system and method of 3D measurement

Method used

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  • A high-precision target measurement system and method
  • A high-precision target measurement system and method
  • A high-precision target measurement system and method

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Effect test

Embodiment 1

[0054] A high-precision target measurement system described in this embodiment has a structural block diagram as shown in Question 1, including: a detection platform 1 for placing targets, and the detection platform 1 can be installed on some existing detection platforms as required. On the platform 1; the optical detection unit 2 is arranged above the detection platform 1 and can move in a three-dimensional range, and the optical detection unit 2 uses a controllable moving mechanism to move in a three-dimensional space for collecting the detection The image of the target placed on the platform 1; the data collection and processing unit, which adopts the data collection and processing mechanism, is connected with the optical detection unit 2 and the detection platform 1 respectively, collects the sample detection parameters, and performs corresponding calculation and processing on them , sending; the control unit can adopt automatic control devices such as PLC, and is connected...

Embodiment 2

[0059] On the basis of the high-precision target measurement system described in Embodiment 1, a set of the limiting components preferably includes a first limiting member 14 and a second limiting member 15, and the first limiting member 14 is preferably two limit rods arranged in parallel, and the distance between the two limit rods is smaller than the width of the target for holding the target, such as image 3 Shown; The washer that increases friction is preferably arranged on the said limit rod, and said washer is preferably a rubber ring, and said second limit member 15 includes two limit rods arranged in parallel, and two said limit rods The distance between the rods is smaller than the width of the target material; the second limiting member 15 is independently and freely rotatable, and is fixed on its supporting column in the form of rollers. When the cylindrical target is placed on its upper part, the first limiting member 14 is driven to rotate, and at this time the ...

Embodiment 3

[0064] On the basis of a high-precision target measurement system described in the above embodiments, as figure 2 As shown, a base 5 is provided at the bottom of the detection platform 1, the detection platform 1 and the base 5 are detachably connected, the base 5 provides a stable working environment for the detection platform 1, and provides a buffer role.

[0065] Y-axis guide rails 4 are respectively arranged on both sides of the base 5, and the two Y-axis guide rails 4 are respectively connected to the two bottom ends of a gantry 3, and the gantry 3 can be positioned on the Y-axis. Move along the Y axis on the guide rail 4, and the crossbeam of the gantry 3 is also provided with an X-axis guide rail 31; the X-axis guide rail 31 and the Y-axis guide rail 4 preferably adopt magnetic guide rails, and the magnetic rails run Accurate, to ensure the accuracy of the measurement, the optical detection unit 2 is connected with an X-axis moving mechanism 211, the X-axis moving me...

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Abstract

A high-precision target measurement system and method, including: a detection platform, an optical detection unit, a data collection and processing unit, and a control unit, a hollow cavity is arranged in the middle of the detection platform, and a detachable movable plate is arranged on the hollow cavity , the movable plate can completely cover the hollow cavity, and at least one set of limit components are arranged inside the hollow cavity, the limit components fix the target and can drive the target to rotate, the limit components are connected The rotating device is driven by it; the optical detection unit includes a lens and a grating projection device. Since both the detection platform and the optical detection unit are movable, by controlling the direction and distance of their movement, it is possible to realize the detection of targets of different specifications and shapes. High-precision three-dimensional detection of any position, and the limit component can drive the target to rotate, so that the target does not need to be turned over during the detection process, which improves the detection efficiency.

Description

technical field [0001] The invention relates to an image measuring instrument, in particular to a high-precision target measuring system and method. Background technique [0002] In the field of panel manufacturing, solar thin film battery production and semiconductor device production, metal coating equipment is required. Due to the high price and low actual utilization rate of its important raw material targets, it has always been an important research point for reducing production costs. . The proposal of technologies such as changing the shape of the target, improving the magnetic field distribution environment, optimizing equipment design, etc., has improved the utilization rate of the target to a certain extent. However, there has never been a more convenient method for how to accurately and quickly know the actual usage and utilization rate of the target. [0003] In actual industrial production, with the increase of time, the surface of the target will be etched wi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
Inventor 马栋梁
Owner SUZHOU JUZHEN PHOTOELECTRIC
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