High-precision target material measurement system and method

A measurement system, high-precision technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problem of only two-dimensional data collection, etc., to achieve the effect of precise control and improved stability

Active Publication Date: 2015-03-25
SUZHOU JUZHEN PHOTOELECTRIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] For this reason, the present invention aims to solve the problem that the existing technology must carry out flipping supplementary measurement during the detection process, and can only collect two-dimensional data, thus proposing a method suitable for the field of target use detection that can realize a measurement after the target is placed. Complete, no need to turn over, and realize the high-precision target measurement system and method of 3D measurement

Method used

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  • High-precision target material measurement system and method

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Embodiment 1

[0054] A high-precision target measurement system described in this embodiment has a structural block diagram as shown in Question 1, including: a detection platform 1 for placing targets, and the detection platform 1 can be installed on some existing detection platforms as required. On the platform 1; the optical detection unit 2 is arranged above the detection platform 1 and can move in a three-dimensional range, and the optical detection unit 2 uses a controllable moving mechanism to move in a three-dimensional space for collecting the detection The image of the target placed on the platform 1; the data collection and processing unit, which adopts the data collection and processing mechanism, is connected with the optical detection unit 2 and the detection platform 1 respectively, collects the sample detection parameters, and performs corresponding calculation and processing on them , sending; the control unit can adopt automatic control devices such as PLC, and is connected...

Embodiment 2

[0059] On the basis of the high-precision target measurement system described in Embodiment 1, a set of the limiting components preferably includes a first limiting member 14 and a second limiting member 15, and the first limiting member 14 is preferably two limit rods arranged in parallel, and the distance between the two limit rods is smaller than the width of the target for holding the target, such as image 3 Shown; The washer that increases friction is preferably arranged on the said limit rod, and said washer is preferably a rubber ring, and said second limit member 15 includes two limit rods arranged in parallel, and two said limit rods The distance between the rods is smaller than the width of the target material; the second limiting member 15 is independently and freely rotatable, and is fixed on its supporting column in the form of rollers. When the cylindrical target is placed on its upper part, the first limiting member 14 is driven to rotate, and at this time the ...

Embodiment 3

[0064] On the basis of a high-precision target measurement system described in the above embodiments, as figure 2 As shown, a base 5 is provided at the bottom of the detection platform 1, the detection platform 1 and the base 5 are detachably connected, the base 5 provides a stable working environment for the detection platform 1, and provides a buffer role.

[0065] Y-axis guide rails 4 are respectively arranged on both sides of the base 5, and the two Y-axis guide rails 4 are respectively connected to the two bottom ends of a gantry 3, and the gantry 3 can be positioned on the Y-axis. Move along the Y axis on the guide rail 4, and the crossbeam of the gantry 3 is also provided with an X-axis guide rail 31; the X-axis guide rail 31 and the Y-axis guide rail 4 preferably adopt magnetic guide rails, and the magnetic rails run Accurate, to ensure the accuracy of the measurement, the optical detection unit 2 is connected with an X-axis moving mechanism 211, the X-axis moving me...

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Abstract

The invention provides a high-precision target material measurement system and method. The system comprises a detection platform, an optical detection unit, a data collecting and processing unit and a control unit, wherein a hollow cavity is formed in the middle of the detection platform and provided with a detachable movable plate, the hollow cavity can be totally covered with the movable plate, at least one limiting assembly is arranged in the hollow cavity, the limiting assembly is used for fixing target materials and can drive the target materials to rotate, and the limiting assembly is connected with a driving device and is driven by the driving device; the optical detection unit comprises a lens and a raster projection device, and because the detection platform and the optical detection unit are movable, by controlling the movement direction and the movement distance of the detection platform and the optical detection unit, high-precision three-dimensional detection on any position of the target materials in different specifications and shapes can be achieved; besides, the limiting assembly can drive the target materials to rotate, and therefore the target materials do not need to be turned over in the detection process, and detection efficiency is improved.

Description

Technical field [0001] The invention involves a image measurement instrument, which specifically says a high -precision target measurement system and method. Background technique [0002] In the field of panel manufacturing, solar film battery production and semiconductor device production fields, metal coating equipment is required. Due to its important raw material targets, high prices and low actual utilization rates have always become an important research point for reduced production costs.EssenceThe proposal of changing the shape of the target, improving the magnetic field distribution environment, optimizing equipment design, and other technologies, such as the problem of raising the target utilization to a certain extent.However, how to accurately and quickly learn about the actual use of the target and the use rate, there have been no more convenient ways. [0003] In actual industrial production, as time increases, the surface of the target will be etched out of differe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00
Inventor 马栋梁
Owner SUZHOU JUZHEN PHOTOELECTRIC
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