A High Precision Thin Film Chuck Module Structure
A film clip and group structure technology, applied in the direction of clamping, clamping device, support, etc., can solve the problems of lower production efficiency, poor stability, high processing requirements, etc., to improve production efficiency, realize precise clamping, and simple structure Effect
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[0037] The specific implementation manner of the present invention will be described below in conjunction with the accompanying drawings.
[0038] A high-precision film chuck module structure includes a main chuck body 1, the main chuck body 1 is fixedly connected to the installation base 6, a plurality of chucks 7 are installed on the installation base 6, and a plurality of The air hole 106 is located between the main clip body 1 and the base 6, and the transition base 5 and the fixed clip body 2 that are in contact with each other are installed. The first cavity 201 and the second cavity are respectively opened on both sides of the fixed clip body 2. The body 202 , the first cavity 201 and the second cavity 202 communicate with the air hole 106 respectively, the first clip body 4 is installed in the first cavity 201 , and the second clip body 3 is installed in the second cavity 202 .
[0039] Such as Figure 18 , Figure 19 and Figure 20 As shown, there is a first groove...
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