Particle manipulation system with out-of-plane channel

Abstract

A particle manipulation system uses a MEMS-based, microfabricated particle manipulation device which has an inlet channel, output channels, and a movable member formed on a substrate. The movable member moves parallel to the fabrication plane, as does fluid flowing in the inlet channel. The movable member separates a target particle from the rest of the particles, diverting it into an output channel. However, at least one output channel is not parallel to the fabrication plane. The device may be used to separate a target particle from non-target material in a sample stream. The target particle may be, for example, a stem cell, zygote, a cancer cell, a T-cell, a component of blood, bacteria or DNA sample, for example. The particle manipulation system may also include a microfluidic structure which focuses the target particles in a particular portion of the inlet channel.

Description

technical field [0001] The present invention relates to systems and methods for manipulating small particles in microfabricated fluidic channels. Background technique [0002] Microelectromechanical systems (MEMS) are very small, often movable structures fabricated on substrates using surface or bulk photolithographic processing techniques such as those used to fabricate semiconductor devices. MEMS devices can be, for example, movable actuators, sensors, valves, pistons or switches, with feature sizes of a few micrometers to hundreds of micrometers. For example, movable MEMS switches can be used to connect one or more input terminals to one or more output terminals, all microfabricated on the substrate. The actuation means for the movable switch can be eg thermal, piezoelectric, electrostatic or magnetic. MEMS devices can be fabricated on semiconductor substrates that can manipulate particles passing the MEMS device in a fluid stream. [0003] In another example, a MEMS d...

AI Technical Summary

Problems solved by technology

Problems associated with these systems are cell damage or loss of function due to decompression, difficult and expensive disinfection procedures between samples, inability to subpopulate subpopulations according to different parameters, and owning, operating and maintaining these large and expensive Extensive training required for equipment components

For at least these reasons, the use of flow cytometry has been limited to large hospitals and laboratories, and the technology is not yet available to smaller entities

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