Control method and system for glass coating export pan division
A control method and control system technology, which is applied in the field of glass coating export pan control, can solve the problems of increased chamber glass collision, data tracking error, and easy loss of data tracking, etc., to achieve improved production efficiency, accurate calculation, and Wide range of effects
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[0043] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, the specific implementation manners of the present invention will now be described in detail with reference to the accompanying drawings.
[0044] The invention provides a method and system for controlling the glass coating outlet in separate pots, which is mainly used for controlling the glass coated in a vacuum sputtering chamber in a pot in an outlet transition chamber.
[0045] see figure 1, the glass coating outlet pan control system in some embodiments of the present invention includes an inlet chamber 10, an inlet buffer chamber 20, an inlet transition chamber 30, a vacuum sputtering chamber 40 and an outlet transition chamber 50 arranged in sequence, and also includes a The inlet measuring device 70 before the injection chamber 40, the outlet measuring device 80 arranged in the outlet transition chamber 50, and the background server 90 for data proc...
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