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Resonator element, resonator, oscillator, electronic apparatus, and mobile object

A technology of vibrating elements and moving bodies, which is applied in the fields of oscillators, electronic equipment, moving bodies, vibrating elements, and vibrators. It can solve the problems of not obtaining vibration characteristics of vibrating elements and insufficiently reducing vibration leakage.

Active Publication Date: 2015-05-27
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, even if e / r satisfies the above relationship, depending on the design conditions (for example, the thickness of the vibrating piece), the vibration leakage cannot be sufficiently reduced, and a vibrating element with good vibration characteristics cannot be obtained.

Method used

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  • Resonator element, resonator, oscillator, electronic apparatus, and mobile object
  • Resonator element, resonator, oscillator, electronic apparatus, and mobile object
  • Resonator element, resonator, oscillator, electronic apparatus, and mobile object

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach ＞

[0193] First, a first embodiment of the vibrator of the present invention will be described.

[0194] figure 1 It is a plan view of the vibrator according to the first embodiment of the present invention. figure 2 yes figure 1 The A-A line sectional view in. image 3 yes figure 1 B-B line sectional view in. Figure 4 is a cross-sectional view showing a vibrating arm formed by wet etching. Figure 5 It is a cross-sectional view of a vibrating arm for explaining heat conduction during bending vibration. Figure 6 is a graph showing the relationship between the Q value and f / fm. Figure 7 It is a perspective view showing thickness T, width W1, and W2. Figure 8 It is a plan view showing the dimensions of the quartz vibrating piece used in the simulation. Figure 9 It is a perspective view for explaining the simulation method. Figure 10 ~ Figure 13 Each is a table showing the simulation results. Figure 14 It is a graph showing the relationship between W2 / W1 and QLeak....

no. 2 Embodiment approach ＞

[0274] Figure 35 It is a plan view of the vibrator according to the second embodiment of the present invention. Figure 36 yes Figure 35 The C-C line sectional view in. Figure 37 yes Figure 35 The shown vibrator has a top view of the vibrating element. Figure 38 (a) is Figure 37 The D-D line sectional view in, Figure 38 (b) is Figure 37 E-E line sectional view in. Figure 39 is for illustration Figure 37 An enlarged partial top view of the base of the vibrating element is shown.

[0275] Hereinafter, regarding the second embodiment, differences from the above-described embodiment will be mainly described, and descriptions of the same matters will be omitted.

[0276] The second embodiment differs mainly in the structure of the vibrating element, and is otherwise the same as the above-mentioned first embodiment.

[0277] Figure 35 and Figure 36 As shown, the vibrator 1 has a vibrating element 4 and a package 9 for accommodating the vibrating element 4 . ...

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Abstract

A resonator element includes a resonator blank having a base portion, a vibrating arm, a linking portion, and a connecting portion connects the base portion and the linking portion to each other, in which, when a thickness of the resonator blank is set to T, a width of the base portion is set to W1, and a width of the connecting portion is set to W2, a relationship of 50 μm≰T≰210 μm is satisfied, and a relationship of 0.067≰W2 / W1≰0.335 is satisfied, and in which, when a width of the arm section of the vibrating arm is set to W3, and a width of the hammer head is set to W4, a relationship of W4≧2.8×W3 is satisfied.

Description

technical field [0001] The present invention relates to a vibrating element, a vibrator, an oscillator, electronic equipment, and a moving body. Background technique [0002] Conventionally, resonating elements using quartz are known. Such vibrating elements are widely used as reference frequency sources, oscillation sources, and the like for various electronic devices due to their excellent frequency-temperature characteristics. [0003] The vibrating element described in Patent Document 1 is a tuning fork type, and has a vibrating piece including: a base; a pair of vibrating arms extending from one end side of the base; a connecting portion located at the other end side of the base; a connecting portion connecting them therebetween; and a support arm extending from the connecting portion. [0004] Such Patent Document 1 describes that e / r, which is the ratio of the width r of the connecting portion to the width e of the base portion, is preferably 40% or less, more prefe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/19
CPCH03H9/02157G01L1/106H03B5/32H03H3/04H03H9/0509H03H9/0547H03H9/15H03H9/21H03H9/215
Inventor 山田明法山崎隆
Owner SEIKO EPSON CORP