Bowl-shaped metallic nanostructures

A metal nanostructure and bowl-shaped technology, which is applied in nanotechnology, nano-optics, nanotechnology, etc., can solve the problems affecting the application range of the ball-bowl, the structural parameters are not easy to control, and it is not integrally formed. It is easy to industrialize production and realize The effect of industrialized production and simple preparation method

Active Publication Date: 2017-09-01
TSINGHUA UNIV +1
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Problems solved by technology

[0006] However, in the particle-in-bowl structure, the silver ball is located at the bottom center of the bowl-shaped gold layer through an aluminum oxide layer, and the silver ball and the gold layer are not integrally formed, which affects the ball-in-bowl ( particle-in-bowl) structure, and its structural parameters are not easy to control, and the precision is poor

Method used

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Embodiment Construction

[0024] The bowl-shaped metal nanostructure provided by the present invention, its preparation method, and the detection system using the bowl-shaped metal nanostructure will be further described in detail below in conjunction with the accompanying drawings and specific examples.

[0025] Please also see figure 1 and figure 2 , the present invention provides a method for preparing a bowl-shaped metal nanostructure array 100, which includes the following steps:

[0026] Step S1, providing a substrate 10;

[0027] Step S2, disposing a metal layer 20 on the surface of the substrate 10, the metal layer 20 has a first surface 202, and the first surface 202 is far away from the substrate 10;

[0028] Step S3, setting a patterned mask layer 30 on the first surface 202 of the metal layer 20, the patterned mask layer 30 covers a part of the first surface 202 of the metal layer 20, and exposes the the rest of the first surface 202 of the metal layer 20;

[0029] Step S4, annealing t...

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Abstract

The invention relates to a bowl-shaped metal nanostructure, comprising a base and a bump structure located on the surface of the base. The top surface of the bump structure has a bowl-shaped depression, and the bottom center of the bowl-shaped depression further comprises a A protruding structure, the bowl-shaped concave portion and the protruding structure are integrally formed. The invention also relates to the bowl-shaped metal nanostructure array and a preparation method thereof, and a detection system using the bowl-shaped metal nanostructure.

Description

technical field [0001] The invention relates to a bowl-shaped metal nanostructure. Background technique [0002] Metal gratings such as gold and silver have important applications in many fields, such as nano-optics, biochemical sensors, precision optical instruments for ultra-high resolution imaging, surface plasmons and surface plasmon lithography, etc. [0003] Most of the existing metal gratings are prepared by the lift-off process or electrochemical or dry etching. However, these methods may cause the structure and properties of the metal grating to be unsatisfactory due to the introduction of chemical reagents, or it is difficult to realize Specific shapes and very small nanostructures may easily cause physical instability of metals such as gold and silver. Therefore, it is very challenging to prepare metal gratings such as gold and silver with a certain microstructure by using the above method. [0004] Bowl-shaped metal nanostructure is a metal nanostructure with a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/02G01N21/25
CPCG02B5/0215B82Y20/00G01N21/658G01J3/02G01N21/65H01J37/32431
Inventor 朱振东李群庆白本锋范守善
Owner TSINGHUA UNIV
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