Cleaning device and cleaning method
A technology for cleaning devices and cleaning liquids, applied in cleaning methods and utensils, cleaning methods using liquids, cleaning methods using tools, etc., capable of solving problems such as insufficient cleaning
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no. 1 Embodiment approach
[0092] figure 2 (a) is a plan view showing the positional relationship between the substrate and the single-tube nozzle in the cleaning apparatus of the first embodiment, figure 2 (b) is figure 2 Front view of (a). figure 2 (a) and (b) represent the supply of the cleaning liquid to the surface of the flat substrate by a single-tube nozzle. The single-pipe nozzle 41 as a cleaning liquid supply nozzle discharges the cleaning liquid L from the outside of the upper space of the substrate W toward the surface (upper surface) of the substrate W above the substrate W. That is, the single-tube nozzle 41 supplies the rinse liquid L to the surface of the substrate W from obliquely above. The flushing liquid L may be ultrapure water (DIW), or functional water such as hydrogen water.
[0093] The position, discharge direction, diameter, and flow velocity of the single-tube nozzle 41 are designed so that the rinse liquid L discharged from the single-tube nozzle 41 satisfies the fol...
no. 2 Embodiment approach
[0100] image 3 (a) is a plan view showing the positional relationship between the substrate, the single-pipe nozzle, and the spray nozzle in the cleaning apparatus of the second embodiment, image 3 (b) is image 3 Front view of (a). image 3 (a) and (b) represent the supply of the cleaning liquid to the surface of the flat substrate by the single-tube nozzle and the spray nozzle. The single-pipe nozzle 41 as a cleaning liquid supply nozzle has the same structure as that of the first embodiment. In this embodiment, a spray nozzle 42 is further added to the first embodiment as a cleaning liquid supply nozzle. The discharge of the rinse liquid L1 by the single-tube nozzle 41 is performed simultaneously with the spraying of the rinse liquid L2 by the spray nozzle 42 .
[0101] like image 3 As shown in (b), the spray nozzle 42 sprays the rinse liquid L2 from the outside of the upper space of the substrate W toward the surface (upper surface) of the substrate W above the sub...
no. 3 Embodiment approach
[0106] Figure 4 (a) is a plan view showing the positional relationship between the substrate and the two single-tube nozzles in the cleaning apparatus of the third embodiment, Figure 4 (b) is Figure 4 Front view of (a). Figure 4 (a) and (b) represent supply of the cleaning liquid to the flat substrate surface by two single-tube nozzles. The first single-pipe nozzle 41 has the same configuration as that of the first embodiment. In this embodiment, a second single-pipe nozzle 43 is added to the first embodiment. The discharge of the rinse liquid L1 by the one-tube nozzle 41 is performed simultaneously with the discharge of the rinse liquid L3 by the one-tube nozzle 43 . like Figure 4 As shown in (b), the single nozzle 43 is above the substrate W, and discharges the rinse liquid L3 from the outside of the upper space of the substrate W toward the surface (upper surface) of the substrate W. That is, the single-tube nozzle 43 supplies the rinse liquid L3 to the surface o...
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