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Optical component

A technology for optical components and transparent substrates, applied in optical components, optics, ion implantation plating, etc., can solve problems such as reduced pollution resistance, and achieve the effect of improving durability

Inactive Publication Date: 2015-10-28
AGC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, there is a problem that when dirt is attached to the antifouling film, when the surface of the antifouling film is wiped many times with a cloth, etc., a part of the antifouling film or in some cases the entire antifouling film will be removed, and the resistance Pollution reduction, methods for improving the durability of antifouling membranes have been researched in the past

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0096] Hereinafter, although specific examples are given and described, the present invention is not limited to these examples.

[0097] (1) Evaluation method

[0098] The method of evaluating the characteristics of the optical components obtained in the following experimental examples will be described below.

[0099] (Measurement of surface shape of low reflection film, shape observation of optical parts)

[0100] The surface shape of the antifouling film of the optical member in the following experimental examples was measured and evaluated as follows.

[0101] After forming a low-reflection film and an antifouling film on a transparent substrate, the plane profile of the antifouling film was measured using a scanning probe microscope (manufactured by Seiko Instruments, model: SPA400). Set the measurement mode to DFM mode, and set the scanning area to 3 μm×3 μm. Then, the value of surface roughness Ra was obtained from the obtained planar profile based on JIS B 0601 (200...

example 1

[0115] Optical components were manufactured through the following steps.

[0116] As the transparent base, a glass base (manufactured by Asahi Glass Co., Ltd., Dragontrail (registered trademark)) subjected to a chemical strengthening treatment was used.

[0117] Then, a low reflection film was formed on one side of the transparent base by the following steps.

[0118]First, while introducing a mixed gas obtained by mixing 10% by volume of oxygen in argon gas, using a niobium oxide target (manufactured by AGC CERAMICS, trade name: NBO target) at a pressure of 0.3 Pa, a frequency of 20 kHz, and a power density of 3.8W / cm 2 1. Perform pulse sputtering under the condition that the inversion pulse width is 5 microseconds, and form a high refractive index layer made of niobium oxide (niobium pentoxide) with a thickness of 14 nm on one surface of the transparent substrate.

[0119] Next, while introducing a mixed gas obtained by mixing 40% by volume of oxygen in argon gas, the sili...

example 2

[0133] Optical components were manufactured through the following steps.

[0134] As the transparent base, a glass base (manufactured by Asahi Glass Co., Ltd., trade name: Dragontrail (registered trademark)) subjected to a chemical strengthening treatment was used.

[0135] Then, a low reflection film was formed on one side of the transparent base by the following steps.

[0136] First, while introducing a mixed gas obtained by mixing 10% by volume of oxygen into argon gas, two niobium oxide targets (manufactured by AGC CERAMICS, trade name: NBO target) were used at a pressure of 0.3 Pa, a frequency of 30 kHz, and a power The density is 3.8W / cm 2 AC sputtering was carried out under the condition of , and a high refractive index layer composed of niobium oxide (niobium pentoxide) with a thickness of 14 nm was formed on one surface of the transparent substrate.

[0137] Next, while introducing a mixed gas obtained by mixing 40% by volume of oxygen in argon gas, two silicon tar...

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Abstract

[Solution] Provided is an optical component which comprises a transparent base, a low reflective film laminated on the transparent base, and an antifouling film laminated on the low reflective film. The antifouling film has a surface roughness (Ra) of 3 nm or less.

Description

technical field [0001] The present invention relates to optical components. Background technique [0002] In various display devices such as liquid crystal displays, imaging equipment such as cameras, and various optical equipment, protective members for protecting display members or imaging elements, optical functional members such as lenses constituting the above equipment, etc. (hereinafter also referred to as optical components) are used. part). [0003] In such an optical component, a transparent base is used to transmit light, and a low-reflection film is further provided on the surface of the transparent base. This is to suppress reflection of incident light and decrease in visibility and the like. In addition, when in use, if people's fingers touch it, oil, sweat, cosmetics, etc. will adhere to affect visibility, etc. Therefore, it is configured to further provide an antifouling film on the low-reflection film to make it difficult to adhere. Dirt and remove dirt e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/11B32B7/02B32B9/00G02B1/10
CPCG02B1/11G02B1/105G02B27/0006B32B7/02B32B9/00G02B1/10C23C14/06G02B1/115G02B1/14G02B1/18
Inventor 藤井健辅村上贵章吉原明彦宫村贤郎
Owner AGC INC
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