Dual-axis laser differential confocal LIBS (laser-induced breakdown spectroscopy), RS (Raman spectroscopy) and MS (mass spectrometry) imaging method and device

A dual-axis differential confocal and Raman spectroscopy technology, which is used in measurement devices, Raman scattering, material excitation analysis, etc. It can overcome the problems of low force and drift, and achieve the effect of overcoming the interference of stray light on the focal plane and improving the spatial resolution ability.

Inactive Publication Date: 2015-11-18
BEIJING INSTITUTE OF TECHNOLOGYGY
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AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of simple laser focusing to desorb and ionize the sample, there are still problems such as large laser focusing spot and low spatial resolution of mass spectrometry detection;
[0006] 2) It is impossible to detect neutral atoms, molecules, neutral ions and groups, etc., which restricts the accurate and complete acquisition of sample component information;
[0007] 3) The time required for mass spectrometry imaging is long, and the axial position of the focused spot of the laser mass spectrometer often drifts relative to the sample to be measured

Method used

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  • Dual-axis laser differential confocal LIBS (laser-induced breakdown spectroscopy), RS (Raman spectroscopy) and MS (mass spectrometry) imaging method and device
  • Dual-axis laser differential confocal LIBS (laser-induced breakdown spectroscopy), RS (Raman spectroscopy) and MS (mass spectrometry) imaging method and device
  • Dual-axis laser differential confocal LIBS (laser-induced breakdown spectroscopy), RS (Raman spectroscopy) and MS (mass spectrometry) imaging method and device

Examples

Experimental program
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Effect test

Embodiment 1

[0045] The embodiment of the present invention is based on image 3 The shown high spatial resolution laser dual-axis differential confocal induced breakdown, Raman spectrum-mass spectrum microscopic imaging device, the device uses a pulsed laser 33, a condenser lens 34 and a light-transmitting optical fiber 36 at the focal point of the condenser lens 34 replace figure 1 The point light source 1 in is replaced by a CCD detector 30 figure 1 The first light intensity point detector 15 and the second light intensity point detector 16 located at the focal plane of the relay magnifying lens 13. exist image 3 The exit beam attenuator 37 is introduced into the laser focusing system of the laser, and the detection beam attenuator 38 is introduced into the laser dual-axis differential confocal detection system.

[0046] Such as image 3 The shown high spatial resolution laser dual-axis differential confocal spectrum-mass spectrometer imaging device includes a pulsed laser 33, a co...

Embodiment 2

[0070] Such as figure 2In the shown high spatial resolution laser dual-axis differential confocal spectrum-mass spectrometer imaging device, the point light source 1 can be composed of a pulsed laser 33 along the direction of the incident optical axis 7, a condenser lens 34, and a laser at the focal point of the condenser lens 34. The pinhole 35 is replaced, the ring light generation system 4 can be replaced by the vector beam generation system 31, the pupil filter 32, the first light intensity point detector 15 and the second light intensity point detector located at the focal plane of the relay magnifying lens 13 16 is replaced by a CCD detector 30 .

[0071] The radially polarized light longitudinal field tight focusing system composed of the vector beam generating system 31 , the pupil filter 32 and the measuring objective lens 6 is used to compress the lateral size of the focused spot.

[0072] The remaining imaging measurement methods are the same as in Example 1.

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Abstract

The invention relates to a dual-axis laser differential confocal LIBS (laser-induced breakdown spectroscopy), RS (Raman spectroscopy) and MS (mass spectrometry) imaging method and device and belongs to the technical field of confocal microscopy imaging, MS imaging and spectral measurement. A double-axis differential confocal microscopy imaging technology and spectrum and MS detection technologies are combined, a sample is subjected to high spatial resolution morphological imaging through micro focusing spots, processed with a super-resolution technology, of a dual-axis differential confocal microscope, an MS detection system is used for performing MS detection on electrically-charged molecules or atoms in a microcell of the sample, a spectrum detection system is used for performing microcell spectrum detection on focusing spot excitation spectra including Raman spectra and LIBS spectra, and high spatial resolution of the microcell of the sample and high-sensitivity imaging and detection of components and morphology are realized through advantage complementation of laser multi-spectrum detection and structural fusion. A brand new effective technological approach can be provided for imaging and detection of material components and morphology in the fields such as biology, materials and the like.

Description

technical field [0001] The invention belongs to the field of confocal microscopic imaging technology, spectral imaging technology and mass spectrometry imaging technology, and combines biaxial differential confocal microscopic imaging technology, laser-induced breakdown spectral imaging technology, Raman spectral imaging technology and mass spectrometric imaging technology, and relates to a Dual-axis laser differential confocal LIBS, Raman spectroscopy-mass spectrometry imaging methods and devices have broad application prospects in the fields of biology, materials, minerals, and micro-nano manufacturing. technical background [0002] Mass spectrometry (Mass Spectrometry) is to ionize the components in the sample, so that the generated charged atoms, molecules or molecular fragments with different charge-to-mass ratios are respectively focused under the action of electric field and magnetic field to obtain a spectrum arranged in order of mass-to-charge ratio instrument. Mas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/63G01N21/65G01N27/64
Inventor 赵维谦邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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