Method for producing deep ultraviolet laser light through visible laser direct frequency conversion and all-solid-state deep ultraviolet laser

A direct laser and deep ultraviolet technology, applied in the laser field, can solve the problems of complex light source steps and low conversion efficiency

Inactive Publication Date: 2015-11-18
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The all-solid-state ultraviolet laser pumping device realizes the ultraviolet laser with a wavelength of 320-340nm by quadrupling the fun

Method used

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  • Method for producing deep ultraviolet laser light through visible laser direct frequency conversion and all-solid-state deep ultraviolet laser

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Example 1: An all-solid-state deep ultraviolet laser and deep ultraviolet laser generation method based on BBO and KBBF frequency doubling crystals

[0046] All-solid-state deep ultraviolet laser structure such as figure 1 As shown, the device includes a pump source 1 , a focusing system 2 , an input mirror 3 , a laser gain medium 4 , a double frequency crystal 5 , a plano-concave output mirror 6 , a frequency triple crystal 7 and a flat mirror 8 . Among them, the frequency doubling crystal is the frequency doubling crystal β-BaB used in the ultraviolet band 2 o 4 (BBO), the thickness of the BBO crystal in the direction of light transmission is 0.5mm, the end face of the BBO crystal is polished without coating, and the BBO crystal is cut and processed according to the phase θ ooe =35°~23°, Matching angles are made.

[0047] The frequency tripled crystal 7 is KBe that can be used in the deep ultraviolet band 2 BO 3 f 2 Crystal (KBBF). Adopt the existing prism co...

Embodiment 2

[0051] As described in Embodiment 1, the difference is that the concave surface of the plano-concave output mirror 6 is coated with a dielectric film with a partial reflection of 150-250nm and a reflectivity of 95%-99%, and a high reflection of 550-620nm. For 620-750nm anti-reflection dielectric film (to suppress 620-750nm wavelength laser output), its plane is coated with 150-250nm anti-reflection dielectric film. The flat mirror 8 is coated with a dielectric film with high reflection of 150-250nm. The visible fundamental frequency light generated by the blue LD pump laser gain medium passes through the double frequency crystal to generate double frequency ultraviolet laser, and the remaining visible fundamental frequency light reaches the deep ultraviolet frequency double crystal through the plano-concave output mirror, and the deep ultraviolet double The frequency crystal 7 is placed in a vacuum device, and the 201nm deep ultraviolet laser is output from the flat-concave ou...

Embodiment 3

[0052] Embodiment 3: As described in Embodiment 1, the difference is: wherein, the concave surface of the plano-concave output mirror 6 is plated with a dielectric film between 150-250nm partial reflection and a reflectivity of 95%-99%, for 600- 650nm highly reflective dielectric film, its plane is coated with 150-250nm anti-reflection dielectric film. The flat mirror 8 is coated with a dielectric film with high reflection of 150-250nm. The visible fundamental frequency light generated by the blue LD pump laser gain medium passes through the double frequency crystal to generate double frequency ultraviolet laser, and the remaining visible fundamental frequency light reaches the deep ultraviolet frequency double crystal through the plano-concave output mirror, and the deep ultraviolet double The frequency crystal 7 is placed in a vacuum device, and the 213nm deep ultraviolet laser is output from the flat-concave output mirror after being reflected by the flat mirror.

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Abstract

The invention relates to a method for producing deep ultraviolet laser light through visible laser direct frequency conversion and an all-solid-state deep ultraviolet laser. According to the method, a pumping source pumps a gain medium to directly produce visible light, ultraviolet light is obtained through a double-frequency crystal according to the visible light, and laser light in a deep ultraviolet band is obtained through a triple-frequency crystal. The all-solid-state deep ultraviolet laser comprises a pumping source, a focusing system, an input mirror, a laser gain medium, a double-frequency crystal, a plane-concave output mirror, a triple-frequency crystal, and a reflective mirror. The device has the advantages of compact structure, simple operation, small size, and easy integration. The method for acquiring deep ultraviolet laser light has the characteristics of concise process and high conversion efficiency.

Description

technical field [0001] The invention relates to a method and a device for generating deep ultraviolet laser through direct frequency conversion of visible laser, belonging to the technical field of laser. Background technique [0002] Ultraviolet lasers have important applications in scientific research, industry and medical treatment, and are currently the fastest growing part of the laser market. In addition, with the development of modern instruments such as nano-fine laser processing, ultra-high energy resolution photoelectron spectroscopy and photoelectron emission microscopes, The research of deep ultraviolet coherent light source is also very urgent. There are three types of deep ultraviolet lasers: solid-state ultraviolet lasers, gas ultraviolet lasers and semiconductor laser diodes, each of which has its own advantages and disadvantages. Among them, the solid-state ultraviolet laser can be pumped by xenon lamp, krypton lamp and laser diode, and the ultraviolet lase...

Claims

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Application Information

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IPC IPC(8): H01S3/109H01S3/0941
Inventor 王继扬张玉霞于浩海张怀金
Owner SHANDONG UNIV
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