15 results about "Ultraviolet laser light" patented technology

A method for inter-substrate transfer of microelectronic devices includes applying a polymer coating to a top surface of a microelectronic device located on a first substrate, depositing an ultraviolet-transmissive adhesive on a second substrate, contacting the polymer-coated top surface of the microelectronic device to the adhesive to bond the microelectronic device to the second substrate, detaching the microelectronic device from the first substrate, and, while the bottom surface of the microelectronic device faces a third substrate, irradiating and ablating the polymer coating with ultraviolet laser light through the second substrate and the adhesive to transfer the microelectronic device from the second substrate to the third substrate via laser lift-off. The method allows for use of ultraviolet-transmissive adhesives, with the polymer coating protecting the microelectronic device from damage by ultraviolet light that, in the absence of the polymer coating, would be transmitted by the adhesive during laser lift off.

The invention relates to the technical field of laser output, in particular to a system and method for outputting deep ultraviolet laser through a single optical fiber, and the system comprises a seed laser source, an optical fiber Raman conversion module, a frequency doubling module and a sum frequency module. All modules at the front end of the system can be directly and optically connected through optical fibers, multiple sets of laser sources and frequency locking operation or a complex spatial light path calibration process are not needed, the spatial light path layout is simplified, natural and excellent light beam quality is achieved, the defect that a spatial light path is prone to being interfered by the environment is overcome, and a foundation is laid for the subsequent nonlinear change process; and the optical fiber element can be directly integrated, so that the system integration degree is improved, the heat distribution of the optical fiber element is more uniform, the overall heat management difficulty of the system is reduced, and the stability and the line width consistency of deep ultraviolet laser output are improved.

A method of manufacturing a semiconductor device and a semiconductor device are provided. A method for manufacturing a semiconductor element includes forming a tin-containing oxide film on a gallium oxide-based compound, irradiating the tin-containing oxide film with an ultraviolet laser, thereby doping tin in the gallium oxide-based compound, and forming a metal electrode on the tin-containing oxide film irradiated with the ultraviolet laser.

This invention provides a method for protecting the surface of aluminum alloys, aluminum alloy workpieces, and their applications, relating to the fields of aluminum alloy surface modification and laser protection technology. The method includes: preparation of microstructures on the aluminum alloy surface, anodic oxidation growth array, electrochemical deposition of ultraviolet absorbing particles, and sealing treatment. The dual three-dimensional structure formed by the microstructure substrate and the anodic oxidation array increases the laser contact area and extends the laser reflection path. The bismuth-doped tin oxide composite absorbing particles achieve highly efficient absorption of ultraviolet laser light, with absorption rates exceeding 95%, and significant stray light suppression.

The present invention relates to a 399.08-nm wavelength ultraviolet laser light generating device, comprising: an excitation light source part for converting a 1064.2-nm laser light to a second harmonic, and generating a 532.1-nm laser light; an optical parametric oscillating part for generating a 798.15-nm signal light and a 1596.3-nm idler light using the 532.1-nm laser light; a first wavelength converting part for generating a 399.08-nm light by sum frequency generation of the 1596.3 nm idler light and a 532.1-nm light; and a second wavelength converting part for generating a 399.08-nm light of a second harmonic from the 798.15-nm signal light. The order of the first wavelength converting part and the second wavelength converting part is random. The present invention relates to a 228.04-nm wavelength ultraviolet laser light generating device comprising the 399.08-nm wavelength laser light generating device and a third wavelength converting part for subjecting a 399.08-nm light and a 532.1-nm light to sum frequency generation, and generating a 228.04-nm light. The present invention provides a simple device of generating a 228.04-nm laser light which is a deep ultraviolet ray in high efficiency and a simple 399.08-nm ultraviolet laser light generating device usable as a light source thereof.

The invention provides biochemical integrated equipment based on a Raman principle, and relates to the technical field of biochemical sample detection, and the biochemical integrated equipment comprises a deep ultraviolet laser light source used for generating an excitation light beam of an ultraviolet band; the coaxial light path assembly comprises an incident light path for guiding the excitation light beam and a receiving light path for collecting a Raman scattering signal generated by the sample; the spectrum light splitting and detecting unit is used for splitting the Raman scattering signal collected by the receiving light path and converting the Raman spectrum signal after light splitting into an electric signal; the automatic focusing mechanism is associated with the receiving light path and is used for adjusting the focusing state of the receiving light path according to the distance between the sample to be tested and the device; and the control and data processing unit is connected with the spectrum light splitting and detecting unit and the automatic focusing mechanism, and is used for controlling the action of the automatic focusing mechanism and receiving and processing the electric signal so as to identify the components of the sample to be detected. The equipment overcomes fluorescence interference, realizes long-distance automatic focusing, and can quickly complete biochemical sample identification.

The present application relates to the technical field of 3D printing. Disclosed are a 3D printing optical engine system and a 3D printing device. The system comprises an ultraviolet laser light source, a beam expansion module, a light homogenization module, a relay module and a digital micromirror device which are sequentially arranged on an optical path. The beam expansion module is used for receiving an ultraviolet light beam emitted by the ultraviolet laser light source and expanding the ultraviolet light beam to obtain an expanded light beam. The light homogenization module is used for receiving the expanded light beam and homogenizing the expanded light beam to obtain a homogenized light beam. The relay module is used for receiving the homogenized light beam, and adjusting the angle and dimension of the homogenized light beam to obtain a shaped light beam, the focal length of the relay module being determined on the basis of the spot size of an exit surface of the light homogenization module and the aperture angle of the digital micromirror device. The digital micromirror device is used for receiving the shaped light beam, and controlling the reflection direction of the shaped light beam so as to form a target image to be projected on a printing area. The present application can optimize the optical path layout while ensuring the overall performance of a 3D printing optical engine.

The invention discloses an Innoslab wide-temperature laser suitable for low-altitude economy, and belongs to the technical field of lasers. The laser comprises a seed source generation module, a three-stage Innoslab amplification module and a frequency multiplication conversion module. The seed source generation module outputs high-quality seed light by adopting a diode single-tube pumping oscillation stage crystal and combining with a passive Q-switched element; the three stages of Innoslab amplification modules all adopt diode stack pumping slab crystals, and are matched with a pumping shaping system and a multi-pass folded light path design to realize stepped amplification of seed light energy; and the frequency doubling conversion module converts the fundamental frequency light into ultraviolet laser through a frequency doubling crystal and a frequency tripling crystal. The slab gain medium and the TEC are adopted for precise temperature control, thermal distortion is effectively restrained, the heat dissipation efficiency and the temperature adaptability are improved, and the device has the advantages of being compact in structure, high in output energy, good in light beam quality, stable in wide-temperature working and the like and is suitable for low-altitude radar detection, laser ranging and other complex environments.

This invention provides a high-precision ultraviolet laser control system and method based on pulse width modulation, belonging to the field of laser control technology. It includes an ultraviolet laser generation module, a pulse width modulation module, a laser driving module, and a system control and monitoring module. The ultraviolet laser generation module generates ultraviolet laser light. The pulse width modulation module receives an external trigger signal and generates an electrical pulse signal based on a preset target pulse width value. The laser driving module converts the electrical pulse signal into a driving current to drive the ultraviolet laser generation module. The system control and monitoring module sets the target pulse width and target energy values, monitors the output characteristics of the ultraviolet laser in real time, and adjusts the peak value of the electrical pulse signal or driving current based on the output characteristics of the ultraviolet laser. This invention achieves high-precision and high-stability control of the ultraviolet laser pulse width and energy by combining electrical pulse width modulation with closed-loop feedback.

The utility model discloses a monitoring device for an optical cable line channel, which relates to the monitoring field of the optical cable line channel and comprises a ground and an iron tower, the iron tower is fixedly arranged on one side of the upper end of the ground, a bottom plate is fixedly arranged on one side of the upper end of the ground far away from the iron tower, and a vertical plate is fixedly arranged on the upper end of the iron tower. A support is integrally formed at the upper end of the side, away from the iron tower, of the vertical plate, a mounting block is in threaded connection with the interior of the end, away from the vertical plate, of the support, a connecting column is integrally formed at the bottom of the mounting block, an ultraviolet laser is fixedly mounted in the connecting column, and a fluorescent target is fixedly mounted at the upper end of the bottom plate. A fixing seat is fixedly installed on the side, away from the fluorescent target, of the upper end of the bottom plate, and a fixing shell is integrally formed on one side of the fixing seat. By adopting the structure, the power supply is effectively provided for the driving motor and the camera, the driving motor and the camera are effectively prevented from stopping running, and better usability is improved.

To provide a method of manufacturing a semiconductor element which achieves efficient energy supply, and to provide the semiconductor element.SOLUTION: The method of manufacturing a semiconductor device includes forming a tin-containing film (Ga2O3) 212 on a gallium oxide-based compound (β - SnO2) 210, doping the gallium oxide-based compound 210 with tin by irradiating the tin-containing film 212 with ultraviolet light, forming a metallic film 214 of titanium (Ti), chromium (Cr), nickel (Ni), or the like without removing the tin-containing film 212, and forming electrodes 216 by forming a film of gold (Au) or the like thereon. The metal film 214 constitutes a metal electrode together with the electrode 216.SELECTED DRAWING: Figure 5

1. The name of the design product: ultraviolet laser light path. 2. The use of the design product: the design product is used for ultraviolet laser. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view 1.

The invention discloses a special ultraviolet solid laser device for semiconductor measurement and detection, which belongs to the technical field of laser and nonlinear optics and comprises a pumping source, a focusing system, a resonant cavity input mirror, a laser crystal, a frequency doubling crystal, a frequency doubling total reflective mirror, a frequency doubling output mirror and a dichroic mirror. The resonant cavity input mirror, the laser crystal, the frequency doubling crystal, the frequency doubling total reflective mirror and the frequency doubling output mirror jointly form a laser resonant cavity system; pump light emitted by a pumping source sequentially passes through the focusing system and the resonant cavity input mirror and is irradiated on the laser crystal to generate fundamental frequency light. Fundamental frequency light is reflected by the frequency doubling output mirror and focused, the focused fundamental frequency light enters the frequency doubling crystal, the frequency doubling crystal carries out frequency doubling on the focused fundamental frequency light to obtain ultraviolet light, the ultraviolet light is reflected by the frequency doubling total reflection mirror, passes through the frequency doubling crystal and the frequency doubling output mirror again and then goes out of the cavity, and then ultraviolet laser is output through the dichroic mirror. According to the invention, multi-band ultraviolet laser output is realized, the equipment size is reduced, and the use cost is saved.

A semiconductor device manufacturing method includes forming a tin-containing oxide film on a gallium-oxide-based compound; irradiating the tin-containing oxide film with ultraviolet laser light to dope the gallium-oxide-based compound with tin; and forming a metal electrode on the tin-containing oxide film irradiated with the ultraviolet laser light.

The invention discloses a deep ultraviolet light beam shaping and homogenizing device and a design method. The device comprises a deep ultraviolet laser light source, a first lens group, a second lens group and a detector which are sequentially arranged in the light beam propagation direction. The first lens group comprises two aspheric lenses, the second lens group comprises two cylindrical lenses, and the lenses are made of calcium fluoride or fused quartz materials, and only single surfaces of the lenses have curvature. The device is adaptive to the wave band of 157-248nm, can shape a rectangular light source with the maximum length-width ratio of 6: 1 into uniform square light spots, integrates shaping and homogenizing functions, is simple in structure and low in processing and assembling cost, can stably work in multiple detection distances, has the light spot energy utilization rate of more than 90% and the uniformity of more than 95%, and is suitable for the high-end industrial manufacturing field such as semiconductor photoetching.