31 results about "Ultraviolet laser light" patented technology

To provide a wavelength conversion mechanism capable of outputting a plurality of systems of ultraviolet laser beams having high output power (pulse energy) without causing deterioration of an optical element for branching.SOLUTION: The wavelength conversion mechanism converts the wavelength of a pulsed laser light with a predetermined repetition frequency, the pulsed laser light being a wavelength-conversion-target light, into laser light in an ultraviolet region, the wavelength conversion mechanism including: a branching optical system for branching the wavelength-conversion-target light into pulse units in a time domain; and a plurality of ultraviolet region wavelength conversion elements for converting each of pieces of the wavelength-conversion-target light branched by the branching optical system into the laser light in the ultraviolet region.SELECTED DRAWING: Figure 2

The invention relates to a device and method for testing a deep ultraviolet laser damage threshold of an element, and the device comprises a first laser module which is set to emit deep ultraviolet laser; the second laser module is set to emit ultrashort pulse laser with the same light spot size as that of the first laser module; the beam combining module is arranged to enable the laser emitted by the first laser module and the laser emitted by the second laser module to be coaxial and emit the modulated laser to a test element; the detection module comprises a first detection unit and a second detection unit which are used for detecting light beam energy, the first detection unit is arranged on a light path of the beam combining module and the test element, and the second detection unit is arranged in a light path penetrating out of the test element; and the control module is respectively connected with the first laser module and the second laser module and is used for controlling laser energy emitted by the first laser module and the second laser module and determining a deep ultraviolet laser damage threshold value of the test element according to information sent by the first detection unit and the second detection unit.

A method for inter-substrate transfer of microelectronic devices includes applying a polymer coating to a top surface of a microelectronic device located on a first substrate, depositing an ultraviolet-transmissive adhesive on a second substrate, contacting the polymer-coated top surface of the microelectronic device to the adhesive to bond the microelectronic device to the second substrate, detaching the microelectronic device from the first substrate, and, while the bottom surface of the microelectronic device faces a third substrate, irradiating and ablating the polymer coating with ultraviolet laser light through the second substrate and the adhesive to transfer the microelectronic device from the second substrate to the third substrate via laser lift-off. The method allows for use of ultraviolet-transmissive adhesives, with the polymer coating protecting the microelectronic device from damage by ultraviolet light that, in the absence of the polymer coating, would be transmitted by the adhesive during laser lift off.

The invention provides a high repetition frequency deep ultraviolet pulse laser and a design method thereof. The laser comprises an optical fiber seed source, a multi-stage solid amplifier, a second acousto-optic modulator, a first frequency doubling system, a pre-compensation system, a second frequency doubling system and an output stability adjusting system. The second frequency doubling system comprises a first BBO crystal and a second BBO crystal. The pre-compensation system comprises a spherical mirror group and a cylindrical mirror group which are arranged in front of the first BBO crystal and the second BBO crystal. And the output stability adjusting system is used for accurately controlling the temperature of the first frequency doubling system and the second frequency doubling system so as to maintain a phase matching condition. The obtained laser passes through a series of optical filters and light beam shaping devices, deep ultraviolet laser which is stable and good in monochromaticity is output, the device is suitable for the fields of precise photoetching, micromachining and scientific research, and efficient laser conversion efficiency and stable output performance are ensured.

The invention relates to the technical field of laser output, in particular to a system and method for outputting deep ultraviolet laser through a single optical fiber, and the system comprises a seed laser source, an optical fiber Raman conversion module, a frequency doubling module and a sum frequency module. All modules at the front end of the system can be directly and optically connected through optical fibers, multiple sets of laser sources and frequency locking operation or a complex spatial light path calibration process are not needed, the spatial light path layout is simplified, natural and excellent light beam quality is achieved, the defect that a spatial light path is prone to being interfered by the environment is overcome, and a foundation is laid for the subsequent nonlinear change process; and the optical fiber element can be directly integrated, so that the system integration degree is improved, the heat distribution of the optical fiber element is more uniform, the overall heat management difficulty of the system is reduced, and the stability and the line width consistency of deep ultraviolet laser output are improved.

A method of manufacturing a semiconductor device and a semiconductor device are provided. A method for manufacturing a semiconductor element includes forming a tin-containing oxide film on a gallium oxide-based compound, irradiating the tin-containing oxide film with an ultraviolet laser, thereby doping tin in the gallium oxide-based compound, and forming a metal electrode on the tin-containing oxide film irradiated with the ultraviolet laser.

This invention provides a method for protecting the surface of aluminum alloys, aluminum alloy workpieces, and their applications, relating to the fields of aluminum alloy surface modification and laser protection technology. The method includes: preparation of microstructures on the aluminum alloy surface, anodic oxidation growth array, electrochemical deposition of ultraviolet absorbing particles, and sealing treatment. The dual three-dimensional structure formed by the microstructure substrate and the anodic oxidation array increases the laser contact area and extends the laser reflection path. The bismuth-doped tin oxide composite absorbing particles achieve highly efficient absorption of ultraviolet laser light, with absorption rates exceeding 95%, and significant stray light suppression.

The invention discloses an ultraviolet achromatic objective lens for a processing head of a laser micro-jet device, belonging to the technical field of laser micro-jet devices. The processing head comprises a window, a water cavity and a nozzle, and the nozzle comprises a nozzle. The ultraviolet achromatic objective lens, the window, the water cavity and the nozzle are arranged in sequence along the optical axis direction of the ultraviolet achromatic objective lens. The ultraviolet achromatic objective lens is used to focus ultraviolet laser light into the water cavity and the nozzle. The ultraviolet achromatic objective lens comprises a first biconvex positive lens, a biconcave negative lens, a second biconvex positive lens and a meniscus positive lens group which are coaxially arranged in sequence. After being converged by the first biconvex positive lens, the ultraviolet laser light enters the biconcave negative lens, diverges through the biconcave negative lens, enters the second biconvex positive lens, converges through the second biconvex positive lens, enters the meniscus positive lens group, and converges through the meniscus positive lens group. After being converged by the meniscus positive lens group, the ultraviolet laser light sequentially passes through the window and the water cavity and enters the nozzle. Thus, the achromatic ability of the ultraviolet achromatic objective lens for ultraviolet laser light can be improved.

The present invention relates to a 399.08-nm wavelength ultraviolet laser light generating device, comprising: an excitation light source part for converting a 1064.2-nm laser light to a second harmonic, and generating a 532.1-nm laser light; an optical parametric oscillating part for generating a 798.15-nm signal light and a 1596.3-nm idler light using the 532.1-nm laser light; a first wavelength converting part for generating a 399.08-nm light by sum frequency generation of the 1596.3 nm idler light and a 532.1-nm light; and a second wavelength converting part for generating a 399.08-nm light of a second harmonic from the 798.15-nm signal light. The order of the first wavelength converting part and the second wavelength converting part is random. The present invention relates to a 228.04-nm wavelength ultraviolet laser light generating device comprising the 399.08-nm wavelength laser light generating device and a third wavelength converting part for subjecting a 399.08-nm light and a 532.1-nm light to sum frequency generation, and generating a 228.04-nm light. The present invention provides a simple device of generating a 228.04-nm laser light which is a deep ultraviolet ray in high efficiency and a simple 399.08-nm ultraviolet laser light generating device usable as a light source thereof.

The invention provides biochemical integrated equipment based on a Raman principle, and relates to the technical field of biochemical sample detection, and the biochemical integrated equipment comprises a deep ultraviolet laser light source used for generating an excitation light beam of an ultraviolet band; the coaxial light path assembly comprises an incident light path for guiding the excitation light beam and a receiving light path for collecting a Raman scattering signal generated by the sample; the spectrum light splitting and detecting unit is used for splitting the Raman scattering signal collected by the receiving light path and converting the Raman spectrum signal after light splitting into an electric signal; the automatic focusing mechanism is associated with the receiving light path and is used for adjusting the focusing state of the receiving light path according to the distance between the sample to be tested and the device; and the control and data processing unit is connected with the spectrum light splitting and detecting unit and the automatic focusing mechanism, and is used for controlling the action of the automatic focusing mechanism and receiving and processing the electric signal so as to identify the components of the sample to be detected. The equipment overcomes fluorescence interference, realizes long-distance automatic focusing, and can quickly complete biochemical sample identification.

The present application relates to the technical field of 3D printing. Disclosed are a 3D printing optical engine system and a 3D printing device. The system comprises an ultraviolet laser light source, a beam expansion module, a light homogenization module, a relay module and a digital micromirror device which are sequentially arranged on an optical path. The beam expansion module is used for receiving an ultraviolet light beam emitted by the ultraviolet laser light source and expanding the ultraviolet light beam to obtain an expanded light beam. The light homogenization module is used for receiving the expanded light beam and homogenizing the expanded light beam to obtain a homogenized light beam. The relay module is used for receiving the homogenized light beam, and adjusting the angle and dimension of the homogenized light beam to obtain a shaped light beam, the focal length of the relay module being determined on the basis of the spot size of an exit surface of the light homogenization module and the aperture angle of the digital micromirror device. The digital micromirror device is used for receiving the shaped light beam, and controlling the reflection direction of the shaped light beam so as to form a target image to be projected on a printing area. The present application can optimize the optical path layout while ensuring the overall performance of a 3D printing optical engine.

The invention discloses a laser drilling method and system, control equipment and a readable storage medium, and relates to the technical field of circuit board processing. The laser drilling method comprises the steps that materials of the surface layer of a drilling area are recognized; determining a laser light source according to the surface layer material of the drilling area; a laser light source is configured and excited to irradiate the drilling area; and adjusting the energy of the laser light source according to the surface layer temperature of the drilling area, and exciting the laser light source to irradiate the drilling area by using the adjusted energy until the material on the surface layer of the drilling area is removed. The embodiment of the invention provides the laser drilling method and system, the control equipment and the readable storage medium. The metal layer can be processed by using ultraviolet laser, and the base material layer can be processed by using carbon dioxide laser; the energy of the laser light source is adjusted according to the temperature of the surface layer of the drilling area in the drilling process, it can be guaranteed that the surface layer of the drilling area is not overheated, the hole wall is smooth, carbonization of a base material in the drilling area is avoided, and the drilling yield is increased.

To provide a wavelength conversion mechanism capable of outputting a plurality of systems of ultraviolet laser beams having high output power (pulse energy) without causing deterioration of an optical element for branching.SOLUTION: There is provided the wavelength conversion mechanism for wavelength-converting wavelength-conversion target light, which is pulsed laser light having a predetermined repetition frequency, into laser light in an ultraviolet region, the wavelength conversion mechanism including: a branching optical system for spatially branching the wavelength-conversion target light; and a plurality of ultraviolet wavelength conversion elements for wavelength-converting each wavelength-conversion target light branched by the branching optical system into laser light in an ultraviolet region.SELECTED DRAWING: Figure 1

The invention discloses an Innoslab wide-temperature laser suitable for low-altitude economy, and belongs to the technical field of lasers. The laser comprises a seed source generation module, a three-stage Innoslab amplification module and a frequency multiplication conversion module. The seed source generation module outputs high-quality seed light by adopting a diode single-tube pumping oscillation stage crystal and combining with a passive Q-switched element; the three stages of Innoslab amplification modules all adopt diode stack pumping slab crystals, and are matched with a pumping shaping system and a multi-pass folded light path design to realize stepped amplification of seed light energy; and the frequency doubling conversion module converts the fundamental frequency light into ultraviolet laser through a frequency doubling crystal and a frequency tripling crystal. The slab gain medium and the TEC are adopted for precise temperature control, thermal distortion is effectively restrained, the heat dissipation efficiency and the temperature adaptability are improved, and the device has the advantages of being compact in structure, high in output energy, good in light beam quality, stable in wide-temperature working and the like and is suitable for low-altitude radar detection, laser ranging and other complex environments.

The present invention relates to the technical field of laser devices, and provides a multi-wavelength medical laser system. The system in the present invention comprises: a femtosecond laser, a large-numerical-aperture focusing lens group, a deep ultraviolet nanosecond laser, a beam compensator, a first laser transmission apparatus, a first reflector, a second laser transmission apparatus, a laser light positioning apparatus, an eye-tracking system, and an operating microscope. The deep ultraviolet nanosecond laser generates deep ultraviolet laser light having a wavelength ranging from 190 to 213 nm. The femtosecond laser generates femtosecond laser light having a wavelength ranging from 800 nm to 1100 nm. The first reflector is capable of reflecting the femtosecond laser light and transmitting the deep ultraviolet laser light, or alternatively, the first reflector is capable of reflecting the deep ultraviolet laser light and transmitting the femtosecond laser light, so that a single instrument is capable of both utilizing the deep ultraviolet laser light for precise corneal ablation and employing the femtosecond laser light to perform cutting within the intermediate layer of the cornea. Multiple instruments and patient transfer are not needed during treatment, thereby simplifying a treatment procedure and improving the treatment efficiency.

The invention discloses a tunable ultraviolet laser and a test system. Comprising an electric control module, a laser assembly and a water cooling module. The electric control module is used for controlling the pumping source to emit laser and controlling the working state of the laser; the laser assembly comprises an LD pumping module, an OPO assembly and a frequency doubling crystal, the LD pumping module is used for outputting 355nm ultraviolet laser, and the OPO assembly and the frequency doubling crystal form a resonant cavity which is used for converting the 355nm ultraviolet laser into tunable laser with the wavelength of 440-660nm; variable wavelength laser output is realized by changing the angle of the frequency doubling crystal; and a cooling pipeline of the water cooling module is arranged at the laser assembly and is used for refrigerating the laser assembly. The ultraviolet laser provided by the invention adopts a three-stage frequency conversion design, is simple in structure, high in tuning speed and high in efficiency, realizes simplification of a mechanical structure by utilizing the clamping device of the frequency doubling crystal, and realizes precise angle control. And the balance between a high-power ultraviolet light source and wide tuning output is realized.

This invention provides a high-precision ultraviolet laser control system and method based on pulse width modulation, belonging to the field of laser control technology. It includes an ultraviolet laser generation module, a pulse width modulation module, a laser driving module, and a system control and monitoring module. The ultraviolet laser generation module generates ultraviolet laser light. The pulse width modulation module receives an external trigger signal and generates an electrical pulse signal based on a preset target pulse width value. The laser driving module converts the electrical pulse signal into a driving current to drive the ultraviolet laser generation module. The system control and monitoring module sets the target pulse width and target energy values, monitors the output characteristics of the ultraviolet laser in real time, and adjusts the peak value of the electrical pulse signal or driving current based on the output characteristics of the ultraviolet laser. This invention achieves high-precision and high-stability control of the ultraviolet laser pulse width and energy by combining electrical pulse width modulation with closed-loop feedback.

Embodiments disclosed herein relate to beverage tablets having a ultraviolet laser-marked indicia that is machine readable. The indicia may be read by a beverage machine or a remotely located resource to determine various information relating to the beverage tablet, such as beverage tablet type. Such information may be used to determine brew parameters for forming a beverage from the beverage tablet.

The utility model discloses a monitoring device for an optical cable line channel, which relates to the monitoring field of the optical cable line channel and comprises a ground and an iron tower, the iron tower is fixedly arranged on one side of the upper end of the ground, a bottom plate is fixedly arranged on one side of the upper end of the ground far away from the iron tower, and a vertical plate is fixedly arranged on the upper end of the iron tower. A support is integrally formed at the upper end of the side, away from the iron tower, of the vertical plate, a mounting block is in threaded connection with the interior of the end, away from the vertical plate, of the support, a connecting column is integrally formed at the bottom of the mounting block, an ultraviolet laser is fixedly mounted in the connecting column, and a fluorescent target is fixedly mounted at the upper end of the bottom plate. A fixing seat is fixedly installed on the side, away from the fluorescent target, of the upper end of the bottom plate, and a fixing shell is integrally formed on one side of the fixing seat. By adopting the structure, the power supply is effectively provided for the driving motor and the camera, the driving motor and the camera are effectively prevented from stopping running, and better usability is improved.

To provide a method of manufacturing a semiconductor element which achieves efficient energy supply, and to provide the semiconductor element.SOLUTION: The method of manufacturing a semiconductor device includes forming a tin-containing film (Ga2O3) 212 on a gallium oxide-based compound (β - SnO2) 210, doping the gallium oxide-based compound 210 with tin by irradiating the tin-containing film 212 with ultraviolet light, forming a metallic film 214 of titanium (Ti), chromium (Cr), nickel (Ni), or the like without removing the tin-containing film 212, and forming electrodes 216 by forming a film of gold (Au) or the like thereon. The metal film 214 constitutes a metal electrode together with the electrode 216.SELECTED DRAWING: Figure 5

A system and method for transmitting ultraviolet laser energy for phototherapy. A master laser is provided to generate laser light of wavelengths [lambda] 2 and [lambda] 3, where 1 / [lambda] 2 + 1 / [lambda] 3 is substantially equal to 1 / [lambda] 4, and where [lambda] 4 is in the UVB spectral band. The light is transmitted through a fiber optic cable to a separate housing having a UVB frequency conversion component within the housing for generating UVB light of wavelength [lambda] 4 from input light of wavelengths [lambda] 2 and [lambda] 3. The generated UVB light may be output from the handpiece and applied to the patient.

The invention discloses a random microlens array and a manufacturing method thereof, and belongs to the technical field of semiconductor device manufacturing processes. Aiming at the problems that the structure is not real and random, the template dependence is strong, the morphology is difficult to continuously regulate and control, the process is complicated, the efficiency is low and the random micro-lens array is not suitable for large-area processing in the existing random micro-lens array preparation method, laser of an ultraviolet wave band is irradiated to the surface of a diffuser by utilizing a laser speckle gray scale photoetching system; forming a laser speckle pattern with statistical randomness, taking the intensity distribution of the laser speckle pattern as a natural gray level mask, and transferring the intensity distribution to the photoresist on the surface of the transparent substrate in a gray level exposure mode to form a three-dimensional free-form surface micro-lens morphology which is arranged in a non-periodic manner and has continuous change; therefore, a random micro-lens array preparation scheme which is real and random in structure, adjustable in height, free of a template and simple in process is realized.

The present invention provides an adhesive sheet which has an adhesive layer that is easily releasable by heating and is sufficiently reduced in the passing amount of ultraviolet laser light. The adhesive sheet has an adhesive layer. The adhesive layer contains a polymer and a thermal polymerization initiator. The polymer contains an ethylenically unsaturated group. The content of the thermal polymerization initiator in the adhesive layer is 0.01 part by weight or more relative to 100 parts by weight of the polymer. The adhesive layer has a light transmittance of 70% or less at a wavelength of 355 nm.

1. The name of the design product: ultraviolet laser light path. 2. The use of the design product: the design product is used for ultraviolet laser. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view 1.

The application discloses a laser drilling method, system, control device and readable storage medium, and relates to the technical field of circuit board processing. The laser drilling method comprises the following steps: identifying the material of the surface layer of a drilling area; determining a laser light source according to the material of the surface layer of the drilling area; configuring and exciting the laser light source to irradiate the drilling area; adjusting the energy of the excited laser light source according to the surface layer temperature of the drilling area, and exciting the laser light source to irradiate the drilling area with the adjusted energy until the material of the surface layer of the drilling area is removed. Through the implementation of the laser drilling method, system, control device and readable storage medium provided in the application, the metal layer can be processed by using ultraviolet laser, and the substrate layer can be processed by using carbon dioxide laser; and the energy of the excited laser light source can be adjusted according to the temperature of the surface layer of the drilling area during the drilling process, so that the surface layer of the drilling area cannot be overheated, the hole wall is smooth, the carbonization of the substrate of the drilling area can be avoided, and the drilling yield is improved.

An object of the present invention is to provide a paper sheet for ultraviolet laser printing, which allows a print-out spot excellent in print-out clarity with respect to one dot to be obtained when irradiated with ultraviolet laser, a print product in which an irradiated region is discolored by irradiation of the paper sheet for ultraviolet laser printing, with ultraviolet laser, and a method for producing the print product, as well as an ink composition to be used for production of the paper sheet for ultraviolet laser printing. An additional object of the present invention is to provide a processed article formed with the paper sheet for ultraviolet laser printing or print product. The paper sheet for ultraviolet laser printing of the present invention comprises a print layer comprising titanium oxide, on a paper substrate, in which a titanium oxide content in the print layer is 0.1 g / m2 or more, and a crystallite size of the titanium oxide in the print layer is 30 nm or more.

The invention discloses a special ultraviolet solid laser device for semiconductor measurement and detection, which belongs to the technical field of laser and nonlinear optics and comprises a pumping source, a focusing system, a resonant cavity input mirror, a laser crystal, a frequency doubling crystal, a frequency doubling total reflective mirror, a frequency doubling output mirror and a dichroic mirror. The resonant cavity input mirror, the laser crystal, the frequency doubling crystal, the frequency doubling total reflective mirror and the frequency doubling output mirror jointly form a laser resonant cavity system; pump light emitted by a pumping source sequentially passes through the focusing system and the resonant cavity input mirror and is irradiated on the laser crystal to generate fundamental frequency light. Fundamental frequency light is reflected by the frequency doubling output mirror and focused, the focused fundamental frequency light enters the frequency doubling crystal, the frequency doubling crystal carries out frequency doubling on the focused fundamental frequency light to obtain ultraviolet light, the ultraviolet light is reflected by the frequency doubling total reflection mirror, passes through the frequency doubling crystal and the frequency doubling output mirror again and then goes out of the cavity, and then ultraviolet laser is output through the dichroic mirror. According to the invention, multi-band ultraviolet laser output is realized, the equipment size is reduced, and the use cost is saved.

A semiconductor device manufacturing method includes forming a tin-containing oxide film on a gallium-oxide-based compound; irradiating the tin-containing oxide film with ultraviolet laser light to dope the gallium-oxide-based compound with tin; and forming a metal electrode on the tin-containing oxide film irradiated with the ultraviolet laser light.

The invention provides a maskless exposure system and a maskless exposure method.In the maskless exposure system, a beam expander carries out beam expanding treatment on light beams emitted by an ultraviolet laser light source to form an exposure field with uniformly distributed light intensity; the polarizer processes the exposure field to form linearly polarized light; the linearly polarized light is modulated by a liquid crystal spatial light modulator to form parallel light which is uniformly distributed; the digital microlens array processes the phase and the amplitude of the parallel light, so that the processed parallel light forms a to-be-exposed pattern on the wafer surface of the wafer workpiece table; the control unit controls the wafer stage to move so as to expose the wafer. According to the exposure mode, the digital pattern to be exposed can be directly transmitted to the photoresist on the surface of the wafer without a mask plate, an infinite exposure area can be realized through the movement of the wafer workpiece table, the exposure efficiency and the exposure precision are improved, and the digital micro lens unit is adopted to replace a traditional shaping light path, so that the system structure is simplified.

The invention provides an ultraviolet laser output mirror, an ultraviolet laser device, and a method for manufacturing an electronic device. An output mirror for an ultraviolet laser light includes a plate-shaped sapphire substrate, at least a portion of one main surface of the sapphire substrate being a partially reflective surface that is exposed and reflects a portion of the ultraviolet laser light and transmits the other portion of the ultraviolet laser light. The other main surface of the sapphire substrate is provided with a reflection suppression structure for suppressing the reflection of the ultraviolet laser light.