The embodiment of the invention provides a
frequency conversion device based on a
lithium niobate
ridge waveguide on an insulator and a preparation method, and belongs to the field of integrated optical,
nonlinear optical and optoelectronic devices. The device comprises a
silicon substrate layer, a
silicon dioxide buffer layer, an x-
cut lithium niobate film layer and a
silicon dioxide cladding from bottom to top, a
ridge waveguide with width periodically changing is arranged on the x-
cut lithium niobate layer, and light in the
waveguide is propagated in the y-axis direction. The waveguide with the width periodically changing is prepared on the
lithium niobate film, quasi-
phase matching is achieved, and therefore the second
harmonic conversion efficiency is greatly improved. By changing the period of the waveguide, second-order nonlinear
phase matching conditions under different wavelengths, such as
phase matching conditions of
second harmonic generation,
sum frequency generation and difference
frequency generation, can be met. Correspondingly, according to the preparation method, the waveguide structure with the periodically changed width can be formed through a single
etching process, and a complex ferroelectric domain inversion step is not needed. The preparation method has the advantages of simple process, controllable morphology and flexible design.