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Semiconductor production equipment support

A technology for production equipment and semiconductors, applied in the field of brackets, can solve problems such as inability to guarantee assembly quality, high assembly difficulty, and low assembly efficiency

Active Publication Date: 2015-12-02
TAICANG GOLDENMA METAL STRUCTURE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The support structure of the existing semiconductor production equipment is relatively simple, usually a whole cuboid, without any auxiliary assembly structure, which makes the assembly difficult, the assembly efficiency is low, and the assembly quality cannot be guaranteed

Method used

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  • Semiconductor production equipment support
  • Semiconductor production equipment support

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Experimental program
Comparison scheme
Effect test

Embodiment

[0017] Embodiment: A support for semiconductor production equipment, including a support body 1 in a rectangular parallelepiped shape, the inside of the support body is hollow, one front of the support body is open, and one end in the length direction of the support body is fixed Cube positioning block 2, the positioning block is provided with a positioning hole 3, the axis line of the positioning hole and the center line of the length direction of the support body are at an angle of 45 degrees, and the lower end surface of the support body is fixed and inverted. T-shaped positioning plate 4, the inverted T-shaped positioning plate is located at the other end of the bracket body in the length direction. The angle between the positioning hole on the positioning block and the bracket body is 45 degrees, which can facilitate assembly and improve assembly efficiency. Through the design of the inverted T-shaped positioning plate, the structure of the bracket is more in line with the...

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Abstract

The invention discloses a semiconductor production equipment support which comprises a cuboid-shaped support body. The interior of the support body is hollow, and one front face of the support body is open; a cube-shaped positioning block is fixed at one end of the support body in the length direction, a positioning hole is formed in the positioning block, and the included angle between the axis line of the positioning hole and the center line of the support body in the length direction is 45 degrees; an inverted-T-shaped positioning plate is fixed on the lower end face of the support body and located at the other end of the support body in the length direction. Due to the fact that the included angle between the positioning hole formed in the positioning block and the support body is 45 degrees, the support can be conveniently assembled, and the assembling efficiency is improved; through the design of the inverted-T-shaped positioning plate, the structure of the support better meets the assembling requirements, manpower needed by assembling can be reduced, and the assembling quality is guaranteed.

Description

technical field [0001] The invention relates to a bracket, in particular to a semiconductor production equipment bracket. Background technique [0002] The support structure of the existing semiconductor production equipment is relatively simple, usually a whole cuboid, without any auxiliary assembly structure, which makes the assembly difficult, the assembly efficiency is low, and the assembly quality cannot be guaranteed. [0003] In view of the above-mentioned defects, the designer is actively researching and innovating in order to create a semiconductor production equipment support to make it more industrially useful. SUMMARY OF THE INVENTION [0004] In order to solve the above technical problems, the object of the present invention is to provide a semiconductor production equipment bracket that can improve assembly efficiency and ensure assembly quality. [0005] A bracket for semiconductor production equipment proposed by the present invention is characterized in t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16M13/02
Inventor 马志刚占峰陈伟钱怡史大金
Owner TAICANG GOLDENMA METAL STRUCTURE
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