short arc discharge lamp
A discharge lamp and short-arc technology, which is applied in the sealing structure of discharge lamps, can solve problems such as metal foil fusing and luminous tube rupture, and achieve high reliability, crack suppression, and superior durability
Active Publication Date: 2017-03-29
ORC MFG
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- Application Information
AI Technical Summary
Problems solved by technology
[0004] During lamp lighting, when a crack occurs near the metal ring due to the difference in thermal expansion rate between the metal ring and the sealed tube, the metal ring in a high-temperature state contacts the outside air and oxidizes, causing the metal foil to fuse
Or there is a possibility that the glow tube will break due to the development of a crack
Method used
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Embodiment
[0068] Next, the discharge lamp of the embodiment will be described. Here, vary the thickness of the foil and see if cracks develop.
[0069] In the short-arc discharge lamp of the embodiment, it is determined that the outer diameter of the sealed tube is 27 mm, the thickness of the sealed tube is 3.5 mm, the outer diameter of the cylindrical outer glass member is 20 mm, the number of sheets of metal foil is 5 mm, and the width is 10 mm. . And determined as: the rated power is 4.5kW, the current value is 155mA.
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Provided is a discharge lamp in which the occurrence of cracks is suppressed in the sealing tube when the lamp is lit. This short-arc discharge lamp is equipped with: an electrode support rod which is provided inside a sealing tube formed integrally with an arc tube, and which supports an electrode inside the arc tube; an electrical connection rod which is electrically connected to an external power source; a glass member into which the electrode support rod and the electrical connection rod are inserted, and which is fused with the sealing tube; a plurality of strips of metallic foil which extend along the outer surface of the glass member; and a pair of annular members which electrically connect the electrode support rod and the electrical connection rod with the strips of metallic foil. The rated power is at least 3kW, the current value during stable lighting is at least 130A, and the amount of mercury enclosed in the arc tube is at most 7mg / cc. The thickness of the strips of metallic foil is set so that the following formulae are satisfied. &sgr;=7.54×105T-6×107 T=1.92(I / nwd)+98.9 &sgr;≤1.20×108
Description
technical field [0001] The invention relates to a short-arc discharge lamp, in particular to a sealing structure of the discharge lamp. Background technique [0002] In a short-arc discharge lamp, a glass sealing tube is integrally formed at both ends of a luminous tube enclosing electrodes, and an electrode support rod for supporting the electrode is held in the sealing tube via a cylindrical glass tube. In the metal foil-based sealing structure, the diameter of the sealing tube is reduced by heat, and the sealing tube is welded to the glass tube. Thereby, the metal foil is sealed, and the inside of the arc tube becomes airtight. [0003] In the field of semiconductor and liquid crystal manufacturing, increasing the power of short-arc discharge lamps has been developed in order to improve production efficiency. Therefore, for a discharge lamp with a large rated power, the metal ring is fixed to the electrode support rod, and a plurality of metal foils are welded to the me...
Claims
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IPC IPC(8): H01J61/36
CPCH01J9/323H01J61/366H01J61/86
Inventor 冈井稔细木裕介林武弘
Owner ORC MFG