A heating source device of an evaporation machine and an evaporation machine

Abstract

The invention provides a heating source device of an evaporation machine and an evaporation machine, which relate to the technical field of evaporation. The invention is invented to solve the problem that the cleaning and maintenance of linear heating source devices in the prior art takes a long time and is relatively difficult. The heating source device of the vapor deposition machine of the present invention includes: a heating box body, a heating chamber is arranged inside the heating box body, a heating source is connected to the heating box body, and an opening is arranged on the top of the heating box body; the inner layer The box body, the inner box body is arranged in the heating cavity of the heating box body, and the inner layer box body can be taken out from the heating cavity of the heating box body; the nozzle assembly, the nozzle assembly includes a nozzle, the The nozzle is arranged on the top of the inner box; the crucible is arranged inside the inner box, and the crucible can be taken out from the inside of the inner box. The heat source device and the vapor deposition machine of the present invention can be used to make the organic functional layer of the organic light emitting diode.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to a heating source device of an evaporation machine and an evaporation machine. Background technique [0002] In order to form an organic functional layer of an OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode), an evaporation machine is usually used to heat and evaporate the organic material, so that the gaseous organic material is uniformly attached to the substrate to a certain thickness. Existing vapor deposition machines can be divided into two types: point source type and line source type according to the form of heating source. Compared with point source type, line source type vapor deposition machine has high material utilization rate and uniform deposition Good advantages have been widely used in the field of evaporation technology, but there are defects in the maintenance of the line source evaporation machine, that is, the cleaning and maintenance of ...

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Problems solved by technology

[0004] However, the complete disassembly method is used for cleaning, and the disassembly of the heating source and the cooling device from the heating box and the subsequent installation are complicated and time-consuming, which reduces the maintenance efficiency of the heating source device; the dry-burning process is used for cleaning, and the high temperature is easy to use. The cracking and carbonization of organic materials makes it impossible to use this method to remove residual organic materials, and the high-temperature gas is ejected from the gas outlet of the nozzle and radiates to the parts around the gas outlet, which increases the deterioration speed of parts and thus improves these The replacement frequency of parts, in addition, if the organic material is a molten material, it will cause the organic material to melt, flow and drip, which increases the difficulty of maintenance

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