A bearing steel ball strengthening treatment device and treatment method

Abstract

The invention discloses a bearing steel ball strengthening treatment device, which comprises a vacuum treatment chamber, a rotating mechanism, a transmission mechanism, a high-voltage target stage, a plasma generator, a high-power high-voltage pulse power supply, a gas supply system and a high-vacuum pumping system. A processing method of the processing device is also disclosed. The present invention forms a complete set of ion implantation processing equipment through the cooperation of a vacuum processing chamber, a rotating mechanism, a transmission mechanism, a high-voltage target platform, a plasma generator, a high-power high-voltage pulse power supply, a gas supply system and a high-vacuum pumping system. The radio frequency power supply establishes radio frequency discharge nitrogen, carbon and argon plasma, and the high-power high-voltage pulse power supply provides negative high-voltage pulse bias voltage to the processed steel balls to implement ion implantation or film deposition treatment. The steel ball rolls slowly on the target disc, so that the surface of the steel ball can obtain a more uniform injection dose; the effect of strengthening treatment is better.

Description

technical field [0001] The invention relates to a bearing steel ball strengthening treatment device and a treatment method, and belongs to the field of bearing steel ball surface strengthening treatment production equipment and its manufacturing field. Background technique [0002] my country is a big country of bearing production, and the number of bearing exports ranks first in the world. However, most of the domestic bearings are medium and low-grade bearings, with low added value. In addition to the disorderly competition among enterprises, the profit margin is very low; Most of the long-life high-end bearings and special bearings urgently needed by industries such as aerospace and other high-tech and scientific research, atomic power stations, and high-speed trains need to be imported. [0003] Due to the large gap between the metallurgical quality of domestic bearing steel and foreign bearing steel, as well as the gap between domestic bearings and foreign countries in t...

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Problems solved by technology

[0006] Plasma immersion ion implantation (PIII) is a novel ion implantation technology, which eliminates the inherent direct limitation of beamline ion implantation technology. The equipment is relatively simple and the investment cost is low, but it can only process parts in small batches. to the rapid development

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