Magnetic field sensor provided with spiral reset coils
A magnetic field sensor and magnetic field technology, applied in instruments, measuring devices, measuring magnetic variables, etc., can solve the problems of low area utilization, small magnetic field, large current, etc., and achieve high area utilization, strong reset/re-reset The effect of a magnetic field
Pending Publication Date: 2015-12-16
MEMSIC SEMICON WUXI
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[0007] The reset coil 120 is located in the same metal layer. In order to generate the magnetic field required to reset / reset each magnetic field sensing unit, it needs a larger current or needs to occupy a larger area, and its area utilization rate is low. , the magnetic field is small at the same current
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[0025] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0026] Reference herein to "one embodiment" or "an embodiment" refers to a particular feature, structure or characteristic that can be included in at least one implementation of the present invention. "In one embodiment" appearing in different places in this specification does not all refer to the same embodiment, nor is it a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words connected, connected, and connected in this article that indicate electrical connection all indicate direct or indirect electrical connection, and indirect electrical connection refers to electrical connection via another device or circuit.
[0027] Figure 3a It is a schematic diagram of...
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The invention provides a magnetic field sensor. The magnetic field sensor comprises at least one magnetic field sensing unit and at least one spiral reset coil spirally surrounding the corresponding magnetic field sensing unit, wherein each magnetic field sensing unit is provided with an easy magnetization shaft and a magnetic sensitive shaft perpendicular to the easy magnetization shaft, each spiral reset coil comprises a first lead portion located above the corresponding magnetic field sensing unit, a second lead portion located under the corresponding magnetic field sensing unit and a third lead portion for connecting the first lead portion with the second lead portion and penetrating through the plane where the corresponding magnetic field sensing unit is located. The spiral reset coils spirally surrounding the corresponding magnetic field sensing units are arranged in the magnetic field sensor, the area utilization rate can be high, and a stronger reset / re-reset magnetic field can be produced.
Description
【Technical field】 [0001] The present invention relates to a magnetic field sensor, in particular to a magnetic field sensor with a helical reset coil. 【Background technique】 [0002] At present, magnetic field sensors based on the magnetoresistance effect have been widely used, such as anisotropic magnetoresistance (AMR) magnetic field sensors, giant magnetoresistance (GMR) magnetic field sensors and tunneling magnetoresistance (TMR) magnetic field sensors. Generally speaking, when the magnetic field sensor based on the magnetoresistive effect changes in the direction and magnitude of the magnetic field, the resistance of the device will change accordingly. The structure of the magnetic field sensor usually includes a layer of soft magnetic material, such as iron, cobalt, nickel, cobalt-iron-boron alloy or nickel-iron alloy (permalloy). When the direction and magnitude of the magnetic field change, the magnetization direction of the soft magnetic material layer changes acco...
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IPC IPC(8): G01R33/09
Inventor 蒋乐跃赵阳
Owner MEMSIC SEMICON WUXI