A traveling wave structured light detector chip and its preparation method
A technology of traveling wave structure and photodetector, which is applied in the direction of instruments, optics, light guides, etc., can solve the problems of unfavorable radio frequency signal transmission of radio frequency transmission lines, increase the effective mode coefficient of transmission lines, affect the photoelectric conversion efficiency and other problems, and achieve high application prospects. Easy processing, high responsiveness effect
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[0024] The drawings are for illustrative purposes only, and should not be construed as limitations on this patent; in order to better illustrate this embodiment, some parts in the drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product;
[0025] For those skilled in the art, it is understandable that some well-known structures and descriptions thereof may be omitted in the drawings. The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0026] figure 1 (a) is the overall structural diagram of the detector chip of the present invention, figure 1 (b) is a schematic diagram of the corresponding cross section, where 1 is the optical waveguide, 2 is the metal electrode, 3 is the dielectric buffer layer, 4 is the chip substrate, and 5 is the photodiode unit.
[0027] figure 2 It is a schematic diagram of the curved waveguide in the present inventi...
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