The invention discloses a
radio frequency plasma comprehensive testing device and method for an
ion process
system, and relates to the technical field of
plasma testing, and the device comprises a host and a
coupling probe; the
coupling probe is placed on a
radio frequency transmission line of an
ion process
system, is used for carrying out
coupling sampling on
radio frequency energy through a
capacitance or
inductance coupling mode according to an
electromagnetic field coupling principle, obtains current and
voltage signals through coupling, and is also used for sensing and obtaining real-time temperature data in the probe; the host comprises a main body shell and a shielding frame arranged in the main body shell, and a
data processing and analyzing unit is arranged in the shielding frame and used for performing
data processing on the received
voltage, current and temperature signals; the radio frequency power supply power, the radio frequency power supply
frequency spectrum, the impedance of the matcher and the vacuum reaction cavity and other
ion process
system parameter values are calculated and generated, and meanwhile
clutter capture and radio frequency transmission
harmonic wave test results in radio frequency transmission are output, so that the comprehensive test of the ion process system is realized.