A preparation method for forming a nanosheet structure network on a substrate and the substrate thereof
A structural network, nano-sheet technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve the problems of unfriendly environmental protection and complex manufacturing steps.
Inactive Publication Date: 2018-06-19
NANOMATERIAL INNOVATION
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Problems solved by technology
In this method, the manufacturing steps are quite complicated, and the metal catalyst layer needs to be removed by an etching process. This etching process will generate a large amount of acidic waste liquid. Therefore, this manufacturing method is not friendly to environmental protection, and this manufacturing method cannot be used directly on The surface of the material forms a graphene sheet structure
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[0045] According to the first embodiment of the present invention, the present invention provides a preparation method for forming a network of nanosheet structures on a substrate, the method comprising the following steps: providing a substrate and a silicon-containing compound; Cracking of the silicon-containing compound in a high-temperature furnace between 1500°C or in a quartz tube of a high-temperature furnace to form a gaseous composition; the hydrocarbon vapor is conveyed by means of argon into the above-mentioned high-temperature furnace or high-temperature furnace at a temperature between 500 and 1500°C In the quartz tube of the above-mentioned high-temperature furnace or the quartz tube of the high-temperature furnace at a temperature between 500 and 1500 ° C, The reactant forms a nano-sheet structure network on the substrate by means of a vapor phase deposition procedure, and there is a covalent bond between the nano-sheet structure network and the substrate.
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Abstract
The invention relates to a preparation method for forming a network of nanosheet structures on a substrate, comprising: providing a substrate and a silicon-containing compound; insulated from air and a high-temperature furnace or a high-temperature furnace quartz at a temperature between 500 and 1500°C The silicon-containing compound is cracked in the tube to form a gas composition; the vapor of the hydrocarbon is conveyed by argon into the above-mentioned high-temperature furnace or the quartz tube of the high-temperature furnace at a temperature between 500 and 1500 ° C, and the vapor of the hydrocarbon and The gas composition formed by the above-mentioned cracked silicon-containing compound is mixed to form a reactant; and the reactant is formed into nanosheets by a vapor deposition process in the above-mentioned high-temperature furnace or a quartz tube of a high-temperature furnace at a temperature between 500 and 1500°C A nanosheet structure network is on the substrate, and there is a covalent bond between the nanosheet structure network and the substrate. Furthermore, the nano-sheet structure network is a graphene-like nano-sheet structure network.
Description
technical field [0001] The present invention relates to a preparation method for forming a nano-sheet structure network on a substrate, in particular to a method for forming a nano-sheet structure network on a substrate by a vapor deposition procedure and a surface having a nano-sheet structure network application of substrates. There is a carbide covalent bond with high bond strength between the nano sheet structure network and the substrate. Secondly, the nano-sheet structure network is a graphene-like nano-sheet structure network, so it has good corrosion resistance, low friction coefficient, good thermal conductivity, electrical conductivity and optical properties. Furthermore, the properties of the substrate with the nanosheet structure network can be adjusted by changing the composition of the vapor phase used in the vapor deposition process, thereby achieving the purpose of applying the substrate in various industries. Background technique [0002] Carbon allotropes...
Claims
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IPC IPC(8): C23C16/30
Inventor 李利于剑峰严英杰
Owner NANOMATERIAL INNOVATION