Coating apparatus and method to improve coating apparatus
A coating device and a coating technology are applied in the direction of a device for coating a liquid, a coating layer, etc., which can solve problems such as cost increase, substrate loading and unloading, inability to install coating devices and mobile placement devices, etc. cost-increasing effect
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[0046] Hereinafter, a preferred embodiment of the coating device and its improvement method according to the present invention will be described in detail with reference to the drawings. figure 1 It is a perspective view which shows the coating apparatus (For example, it is called a table coater (registered trademark in Japan) etc.) of this embodiment.
[0047] The coating device 1 of the present embodiment generally moves the nozzle unit having the nozzle 7 for spraying the coating liquid and the substrate 3 as the coating target placed on the table 4 relative to each other, and sprays the coating liquid from the nozzle 7. The coating device 1 that coats the coating liquid on the substrate 3 is transferred from the outside of the coating device 1 to the external transfer device 14 near the workbench 4 (shown in FIG. image 3 as well as Figure 4 Middle) and the support arm 10 which supports and transfers the board|substrate 3 between the table 4 is provided in the nozzle uni...
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