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Defect inspection system and method thereof

An inspection method and inspection system technology, applied in the direction of optical testing defects/defects, etc., can solve the problems of high camera price and high cost of defective inspection systems, and achieve the effect of reducing costs

Inactive Publication Date: 2019-05-14
SEMISYSCO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In particular, the camera used for defect inspection is expensive, so the cost of defect inspection system is quite high

Method used

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  • Defect inspection system and method thereof
  • Defect inspection system and method thereof
  • Defect inspection system and method thereof

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Embodiment Construction

[0038] Embodiments of the present invention will be described below with reference to the drawings.

[0039] The present invention relates to a defect inspection system, in particular to an edge defect inspection system, which may include a first defect inspection process of inspecting a part of the edge of a substrate and a second defect inspection process of inspecting other edges of the substrate.

[0040] For example, the defect inspection system may include a first defect inspection process performed during the process of transferring the cleaned substrate from the cleaning machine to the turntable (TurnTable), and a process of transferring the substrate from the turntable to the transfer channel (Index). The second defect inspection process carried out.

[0041] Usually, in order to inspect the defects of the four edges of the substrate, it is necessary to install a plurality of cameras in a direction crossing the substrate. However, the defect inspection system of the ...

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Abstract

The invention discloses a defect detecting system capable of reducing cost, and a method thereof. The defect detecting method comprises a first defect detection step, wherein a part of a first substrate is detected when the first substrate is delivered towards a first direction; and a second defect detection step, wherein the rest parts of the first substrate are detected when the first substrate is delivered towards a second direction. The first direction is different from the second direction. According to the defect detecting system and the method, two cameras are used for detecting a part of the first substrate delivered towards the first direction, and two cameras are used for detecting the rest edges of the first substrate delivered towards the second direction. According to the defect detecting system, defects on all the edges of the substrate can be detected using only four cameras, and the number of the cameras is smaller than that of conventional defect detecting systems. Cost of the defect detecting system can be reduced greatly.

Description

technical field [0001] The invention relates to a defect inspection system and method thereof. Background technique [0002] It is very important to detect defective substrates in advance by inspecting defective substrates. usually as figure 1 The edge defect inspection of the substrate is performed as shown. [0003] figure 1 It is a schematic diagram showing a general board edge defect inspection. [0004] Such as figure 1 As shown, a camera 102 is provided in the transverse direction of the substrate, and the camera 102 inspects the edge defect of the substrate. At this point, all four edges of the substrate need to be inspected, so multiple cameras are required. [0005] In particular, cameras used for defect inspection are expensive, and thus the cost of the defect inspection system is considerably high. [0006] prior art literature [0007] Patent document: Korea Authorized Patent Publication No. 1251852 (authorization date: April 1, 2013). Contents of the i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/89
Inventor 姜志浩柳林水
Owner SEMISYSCO CO LTD
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