Method and apparatus for determining a stray magnetic field in the vicinity of a sensor
A sensor and leakage magnetic field technology, applied in the direction of instruments, measuring magnetic variables, measuring devices, etc., can solve problems such as angle errors
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[0022] figure 1 An overview of a device 10 for determining stray magnetic fields in the vicinity of a sensor is shown. The device 10 has a disk-shaped permanent magnet 60 attached to an axle end 60 . The axle rotates about an axis of rotation 70 and the device 10 can measure the angle of rotation 15 of the axle.
[0023] A semiconductor substrate 35, two pairs of vertical Hall sensors 40a and 40b are arranged equidistantly from the axis of rotation of the permanent magnet. The Hall sensors 40 a , 40 b measure the X and / or Y components of the magnetic field and are integrally integrated in the semiconductor substrate 35 . These vertical Hall sensors 40a and 40b are in figure 2 shown in more detail in and subsequently referred to in figure 2 Describe in detail. The circular path 50 is arranged in the chip plane 30 below the permanent magnet 60 . The axis of rotation 70 of the axle runs parallel to the Z direction through the center 55 of the circular path 50 and is arra...
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