Profile correction machining method for high-precision plane of optical part

Abstract

The invention discloses a profile correction machining method for a high-precision plane of an optical part. According to the method, on the basis of traditional grinding and polishing methods, polishing pads located in annular areas in different radial positions of a special profile correction polishing disc are made not to have a material removing effect through the special profile correction polishing disc, and combined with process condition control, different material removal rate distribution curves are obtained; according to initial surface profile morphology deviation of the surface of a workpiece, machining time of process conditions corresponding to various material removal characteristics is designed, so that profile correction machining of the surface of the workpiece is achieved. An upper disc body of the polishing disc is composed of multiple concentric rings with a lifting function, different surface material removal rate distribution characteristics can be obtained, and deterministic machining is achieved. According to the method, profile correction schemes are designed according to the initial surface profile morphology deviation of the optical part, deterministic material removal machining is carried out on the surface, the total removal allowance is small, machining efficiency is high, and cost is low. The profile correction machining method is suitable for to-be-machined workpieces in different shapes and with different thicknesses.

Description

technical field [0001] The invention belongs to the technical field of optical parts processing, in particular to a method for modifying the shape of a high-precision plane of an optical part. Background technique [0002] Plane optical components are an important part of the optical system, such as the plane reflector in the telescope system, the plane standard mirror in the parabolic mirror inspection system, etc. In these systems, the precision of planar optical components affects the imaging quality and inspection results of the system. In recent years, with the development of optical technology, the number of optical elements in the optical system has continued to show a trend of large numbers and large apertures, such as large astronomical telescopes and high-power laser devices. Taking the National Ignition Facility (NIF) of the United States as an example, it is a huge and complex giant optical project. Its requirements for optical components are unprecedented in te...

AI Technical Summary

Problems solved by technology

[0007] In view of the above problems, in order to solve the deficiencies of the existing optical parts processing methods, the main purpose of the present invention is to provide a high-precision plane modification processing method for optical parts. Deterministic global shape modification processing, reducing the removal allowance, improving processing efficiency, avoiding surface high-frequency errors and reducing processing costs, and can be applied to the processing of parts of any thickness

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