Deterministic local physical deliquescing device capable of being applied to polishing KDP (potassium dihydrogen phosphate) crystal as well as polishing method thereof

Abstract

The invention discloses a deterministic local physical deliquescing device capable of being applied to polishing a KDP (potassium dihydrogen phosphate) crystal. The deterministic local physical deliquescing device comprises a workpiece assembly table and a motion platform with a nozzle, wherein the nozzle is communicated with a liquid storage tank through a liquid conveying pipeline; a peristaltic pump capable of conveying reaction liquid in the liquid storage tank to the nozzle is arranged on the liquid conveying pipeline; and the reaction liquid contains a deliquescence reactant and an organic solvent. A KDP crystal polishing method of the device comprises the following steps: firstly, fixing the KDP crystal to be polished on the workpiece assembly table; secondly, taking pure water as the deliquescence reactant, conveying the pure water to the nozzle under the action of the peristaltic pump, deliquescing, removing and limiting the KDP crystal in a nozzle contact area, removing reactant residues on the surface of the KDP crystal by temperature gradient obtained by volatilization of ethanol, and recovering the reactant from the nozzle through a negative pressure generated in a vacuum generator. The deterministic local physical deliquescing device has the advantages of high precision, high efficiency, no damage, low cost and the like.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision processing of functional crystals, and in particular relates to a deterministic polishing processing device and processing method for KDP crystals. Background technique [0002] As a high-quality nonlinear optical crystal, KDP (potassium dihydrogen phosphate) is widely used in laser and optical fields such as inertial confinement fusion solid-state laser drivers, but because of its anisotropy, soft quality, deliquescence and high brittleness , Sensitivity to temperature changes and easy cracking are not conducive to material processing, which makes KDP crystals have a long processing cycle, low pass rate, and unstable quality. Therefore, KDP crystals have become one of the most difficult crystal materials to process. Among the currently commonly used KDP crystal processing methods, non-abrasive polishing KDP will embed abrasive grains on the surface and generate residual stress, and the he...

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Problems solved by technology

[0002] As a high-quality nonlinear optical crystal, KDP (potassium dihydrogen phosphate) is widely used in laser and optical fields such as inertial confinement fusion solid-state laser drivers, but because of its anisotropy, soft quality, deliquescence and high brittleness , Sensitive to temperature changes and easy to crack are not conducive to material processing, which makes the processing cycle of KDP crystal long, low pass rate, and unstable quality, so KDP crystal has become one of the most difficult crystal materials to process at present.

Among the currently commonly used KDP crystal processing methods, non-abrasive polishing KDP will embed abrasive grains on the surface and generate residual stress, and the heat generated during polishing will also damage the surface quality; single-point diamond turning (SPDT) processing KDP has high removal efficiency, but There are tool marks and residual stress on the machined surface, and the surface quality cannot meet the high-precision requirements; magnetorheological (MRF) processing KDP can obtain a high-precision surface, but the iron powder in the magnetorheological fluid will be embedded in the KDP surface, reducing the Surface Laser Damage Threshold

The high-precision and damage-free processing method of KDP crystal has always been an important issue in the field of ultra-precision processing of nonlinear optical crystals, but there is currently no mature technical solution for reference.

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