Three-sensitivity gate interdigitated metal strain gauge that can measure lateral deviation of off-chip lateral deflection

Abstract

The invention provides a lateral deviation three sensitive grid interdigital metal strain gauge capable of measuring gauge outside lateral partial derivatives. The lateral deviation three sensitive grid interdigital metal strain gauge comprises a substrate and three sensitive grids fixed on the substrate, wherein each sensitive grid comprises sensitive sections and transition sections, and axes of the sensitive sections are in the shape of coplanar parallel straight lines; a direction along the direction of the axes in the plane is the axial direction, and a direction vertical to the axial direction is the transverse direction; centers of the three sensitive grids have no deviation in the axial direction and have deviation in the transverse direction; the sensitive grids are respectively called an upper sensitive grid, a middle sensitive grid and a lower sensitive grid from the top to the bottom along the transverse direction according to the sequence of central positions of the sensitive grids; on a plane determined by the axes of the sensitive sections, the upper sensitive grid and the middle sensitive grid are arranged in an interdigital mode, and the middle sensitive grid and the lower sensitive grid are arranged in an interdigital mode; and total resistance variation values of the sensitive sections of the upper sensitive grid, the middle sensitive grid and the lower sensitive grid under the same strain are shown in a proportion of 5:12:7. The lateral deviation three sensitive grid interdigital metal strain gauge is capable of measuring lateral first-order partial derivatives at positions where the distance from the lower outer side of the center of the lower sensitive grid to the center equals the distance from the center to the center of the upper sensitive grid.

Description

Technical field [0001] The invention relates to the field of sensors, in particular to a metal strain gauge. Background technique [0002] The working principle of the metal resistance strain gauge is the resistance strain effect, that is, when the metal wire is subjected to strain, its resistance changes with the magnitude of the mechanical deformation (tension or compression). The theoretical formula of the resistance strain effect is as follows: [0003] [0004] Where R is the resistance value, ρ is the resistivity of the metal material, L is the length of the metal material, and S is the cross-sectional area of ​​the metal material. In the process of mechanical deformation of the metal wire due to strain, ρ, L, and S will change, which will inevitably cause the change of the resistance value of the metal material. When the metal material is stretched, the length increases, the cross-sectional area decreases, and the resistance value increases; when compressed, the length dec...

AI Technical Summary

Problems solved by technology

[0013] In order to overcome the deficiency that the existing metal strain gauges cannot detect the strain deflection, the present invention provides a three-sensitive grid interdigitator that can measure the lateral deflection of the lateral deflection outside the sheet, which can not only measure the strain but also effectively detect the lateral deflection of the surface strain. Metal strain gauges, especially for measuring workpiece corners, edges, etc. where the size of the strain gauges is limited or other transverse first-order deflectors that are not suitable for the location of the strain gauges

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