A Sensitive Structure of Tuning Fork MEMS Gyro with Decoupling Function

Abstract

The invention belongs to a sensitive structure, and particularly relates to a tuning-fork type micro-electromechanical gyro sensitive structure with a decoupling function. The tuning-fork type micro-electromechanical gyro sensitive structure with the decoupling function is distributed in a left-right symmetric mode, and a left half body structure and a right half body structure are each composed of a driving frame, a driving detection switching frame and a detection frame, wherein the driving frame is arranged on the outermost side, the detection frame is arranged on the innermost side, the driving detection switching frame is arranged in the middle, and the left half body structure and the right half body structure are connected into a whole through the driving frames and the driving detection switching frames; each driving detection switching frame is provided with an orthogonal coupling error suppression structure. The tuning-fork type micro-electromechanical gyro sensitive structure with the decoupling function has the advantages that the symmetric type three-frame design is adopted, and the three frames are the driving frames, the driving detection switching frames and the detection frames; meanwhile, single-degree-of-freedom beams are adopted to connect all the frames, the degrees of freedom of motion of all the frames and mass blocks are limited, bidirectional decoupling between driving and detecting is achieved, and coupling errors can be suppressed to a large extent.

Description

technical field [0001] The invention belongs to a sensitive structure, in particular to a tuning fork micro-electromechanical gyro sensitive structure with a decoupling function. Background technique [0002] Gyroscope is an instrument used for angular movement of sensitive carrier relative to inertial space, and is the core device of inertial navigation and guidance system. [0003] MEMS gyro is a new type of inertial instrument manufactured based on microelectronics and micromechanical technology. It has the advantages of small volume, weight, power consumption, high integration, resistance to harsh environments, and low cost. [0004] The tuning-fork MEMS gyroscope based on the Gothic vibration principle is an important technical development direction of the MEMS gyroscope. Its structure is compact and the process is simple. It can be widely used in military fields such as precision-guided munitions and tactical missiles, as well as in the automotive industry and drilling...

AI Technical Summary

Problems solved by technology

Ideally, the beam vibrates along its inertial axis, and the vibration direction is consistent with the driving or detection direction; in practice, due to machining errors, the actual cross-section of the beam deviates from the design value, as shown in Figure 2, its inertia The main axis is no longer coincident with the driving or detection direction, as shown in Figure 3, resulting in cross-coupling of driving and detection, resulting in output error, which is called quadrature coupling error, which has a great impact on the performance of the gyroscope

Images