Push-pull photonic crystal zipper cavity optical accelerometer with electromagnetic feedback

Abstract

The invention discloses a push-pull photonic crystal zipper cavity optical accelerometer with electromagnetic feedback. Light of a narrow linewidth light source is coupled through a spot size converter and enters a Y waveguide to realize light splitting, and light of a first branch end passes through a first input straight waveguide, a first upper nanometer micro beam and a first output straight waveguide and then is received by a first photoelectric detector. The light of the second branch end passes through a second input straight waveguide, a second lower nanometer micro beam and a second output straight waveguide and then is received by a second electric detector. The left driving electrode, the spring oscillator structure and the right driving electrode are respectively arranged between the first input straight waveguide and the second input straight waveguide, between the first upper nanometer micro-beam and the second lower nanometer micro-beam, and between the first output straight waveguide and the second output straight waveguide; the left driving electrode and the right driving electrode are electrically connected with the spring oscillator structure; and a permanent magnet is embedded in the ceramic base below the spring oscillator structure. According to the invention, high-resolution and large-bandwidth detection is realized, common-mode interference noise is suppressed, and the advantages of high integration level, large adjustable range and electromagnetic interference resistance are realized.

Description

technical field [0001] The invention belongs to an optical accelerometer in the technical field of integrated optics and inertial sensing, in particular to a push-pull photonic crystal zipper cavity monolithic integrated optical accelerometer with electromagnetic feedback. Background technique [0002] With the increasing maturity of microelectronic technology, integrated circuit technology and micro-processing technology, MOEMS accelerometer has many advantages such as strong anti-interference ability, suitable for strong electromagnetic interference and strong corruption environment, high sensitivity, small size and light weight. It is widely used in consumer electronics, agricultural automation, autonomous driving, medical equipment, aerospace, industrial robots and other fields. However, MOEMS accelerometers with technical solutions such as grating interference cavity type, F-P cavity type, Bragg grating type, and photonic crystal type cannot achieve both accuracy and ra...

AI Technical Summary

Problems solved by technology

Electrostatic feedback utilizes the attractive or repulsive force between charges, and the stroke of the feedback is not large, which has the disadvantages of high driving voltage and small output force

Piezoelectric feedback is based on the piezoelectric effect of solid dielectrics, which will deform when voltage is applied. Although the drive response is fast and the displacement control accuracy is high, it is difficult to achieve integrated monolithic integration.

Thermal feedback uses the thermal expansion effect, but the displacement control accuracy is poor and the feedback has hysteresis

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