The invention discloses a pulsed
ion beam control system and method for shape modification of an aspheric optical element, and relates to the technical field of optical element manufacturing, temperature rise behaviors of scanning path points are predicted through
simulation, temperature rise prediction data Tpk are output, a time interval is further adjusted based on the result, an optimized path control
instruction set Opt is generated, and the path control
instruction set Opt is used for shape modification of the aspheric optical element. In the actual shaping process, temperature rise deviation data Dev are obtained by dynamically comparing a real-time temperature rise response value Trl with the temperature rise prediction data Tpk, a
thermal feedback deviation set DevSet is formed, the closed-loop
verification and
thermal control correction capacity of prediction and actual
machining behaviors is achieved, the shaping residual image Res formed on the basis of secondary
surface shape detection, and the
thermal feedback deviation set DevSet is formed on the basis of secondary
surface shape detection. According to the method, quantitative judgment on the modification effect is realized, and the technical problems that the
thermal coupling cumulative effect is not considered, the thermal abnormal region cannot be dynamically identified and the scanning path cannot be fused with the thermal structure sensitivity in the prior art are effectively solved.