Tuning fork type micro-electro-mechanical gyroscope

Abstract

The invention belongs to the technical field of inertial measurement and particularly relates to a micro-electro-mechanical gyroscope. The tuning fork type micro-electro-mechanical gyroscope comprises a driving portion, a detecting portion, a driving detection adapter portion and a double-mass-block coupling portion and is arranged in layout in a bilateral symmetry mode, the left portion or the right portion is arranged in a vertical symmetry mode, and the left portion or the right portion comprises a driving portion, a detecting portion, a driving detection adapter portion and a double-mass-block coupling portion. The tuning fork type micro-electro-mechanical gyroscope has the advantages that coupling errors can be inhibited, energy loss can be reduced, high sensitivity can be obtained, the phase difference and frequency difference problems caused by coupling absence and low coupling can be solved, and the adaptive capacity to environment of the gyroscope can be improved.

Description

technical field [0001] The invention belongs to the technical field of inertial measurement, and in particular relates to a micro-electromechanical gyroscope. Background technique [0002] Gyroscope is an instrument used for angular movement of sensitive carrier relative to inertial space, and is the core device of inertial navigation and guidance system. [0003] MEMS gyro is a new type of inertial instrument manufactured based on microelectronics and micromechanical technology. It has the advantages of small volume, weight, power consumption, high integration, resistance to harsh environments, and low cost. [0004] The tuning-fork MEMS gyroscope based on the Gothic vibration principle is an important technical development direction of the MEMS gyroscope. Its structure is compact and the process is simple. It can be widely used in military fields such as precision-guided munitions and tactical missiles, as well as in the automotive industry and drilling detection. civilia...

AI Technical Summary

Problems solved by technology

[0006] 1) It is difficult to completely decouple the driving and detection motion

Tuning-fork MEMS gyroscopes include two operating modes: driving and detection. Most of the existing tuning-fork MEMS gyroscopes can only realize the decoupling of a single direction of driving (or detection), and cannot effectively isolate the motion of driving / detection in two different directions. Introduce coupling error, gyro performance is difficult to improve

figure 1 To simplify the model of a typical single-direction decoupling sensitive structure, define the X direction as the driving direction, and the Y direction as the detection direction, then figure 1 (a) The model can only achieve decoupling of driving modes, figure 1 (b) The model can only achieve detection mode decoupling

figure 2 for figure 1 (a) A schematic diagram of a typical structure corresponding to the model. The main structure is a two-frame design, including the outer driving frame and the inner detection frame. The motion of the proof mass 4 and the driving mass 2 in the driving X direction cannot be effectively isolated

[0007] 2) The energy transfer efficiency between tuning fork masses is low

Most of the detection modes of the existing gyro-sensitive structure dual-mass blocks have not achieved coupling, which cannot effectively realize energy transfer and cannot suppress external common-mode interference

like image 3 A simplified model of a sensitive structure is shown. There is no energy transfer between the double masses and no resonance can be formed. Therefore, in its working mode, there will be phase difference, frequency difference, large energy loss and low sensitivity.

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