Preparation method of all-solid secondary battery components
A secondary battery, all-solid-state technology, used in secondary battery manufacturing, secondary batteries, electrical components, etc., can solve problems such as series-parallel integration of thin-film and miniaturized battery components
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Embodiment 1
[0084] refer to Figure 4 (a) A Si sheet with a size of 2 cm × 2 cm was selected as a rigid insulating substrate. After cleaning, a Pt film with a thickness of about 200 nm was deposited on the Si sheet by DC magnetron sputtering as the first current collector layer. The surface of the Pt film deposited on the Si sheet is 0.7cm and 1.2cm away from the A side, and the laser is used to sequentially scribe to form two first grooves, and the current collector layer is divided into 3 regions, and 0.2cm and 1.2cm are respectively reserved on both sides. 0.3cm for edge cleaning process, the width of the first trench is 80μm.
[0085] refer to Figure 4 (b), LiCoO deposited on the Pt current collector layer by RF magnetron sputtering 2 Positive thin film with a thickness of about 500nm. It was then annealed at 700° C. for 2 hours in air. Then in LiCoO 2 Deposit a LiPON solid electrolyte film with a thickness of 2 μm on the positive electrode film, and the conditions for depositin...
Embodiment 2
[0092] Embodiment 2 differs from Embodiment 1 in that the material of the substrate is different. A stainless steel sheet with a size of 2cm×2cm was selected as a rigid substrate. After cleaning, a 300nm-thick Al was deposited on the stainless steel sheet by radio frequency magnetron sputtering. 2 o 3 Thin film as insulating layer to get stainless steel sheet / Al 2 o 3 Rigid insulating substrate. Referring again to Embodiment 1, the deposition and scribing processes are sequentially performed. It should be noted that since the substrate used in Example 2 is different from that in Example 1, it is necessary to adjust the laser power when marking the first groove so that the Pt current collector layer is broken while ensuring that the stainless steel sheet substrate is not broken .
[0093] refer to Figure 5 , the all-solid secondary battery assembly obtained in Example 2, each battery has a structure: stainless steel sheet / Al 2 o 3 / Pt / LiCoO 2 / LiPON / Graphite / Pt.
Embodiment 3
[0095] refer to Figure 6 (a) A Si sheet with a size of 2cm×2cm was selected as a rigid substrate. After cleaning, a Pt film with a thickness of about 200nm was deposited on the Si sheet by DC magnetron sputtering as the first current collector layer. Then, LiCoO with a thickness of about 500 nm was deposited on the Pt current collector layer by radio frequency magnetron sputtering technology. 2 positive film. It was then annealed at 700° C. for 2 hours in air.
[0096] refer to Figure 6 (b), on Si / Pt / LiCoO 2 The surface of the film is 0.9 cm away from side A to form a scribed groove by mechanical scribing to obtain a primary parallel film, and the width of the scribed groove is about 100 μm.
[0097] refer to Figure 6 (c) Edge cleaning is performed from 0.4 cm away from side B of the primary parallel film to the edge of side B to expose the Si sheet.
[0098] refer to Figure 6 (d), depositing a 2 μm thick LiPON solid electrolyte film on the surface of the primary pa...
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