Rotor device for vacuum pump and method of manufacturing the same

Abstract

The invention relates to a rotor assembly for a vacuum pump and especially for a turbomolecular pump. The rotor assembly comprises a rotor shaft and at least on rotor disk. The rotor disk comprises an accomodating opening for accomodating the center of the rotor shaft. The rotor disk is arranged on the rotor shaft. A mechanical connection is built between the rotor disk and the rotor shaft. The rotor assembly is characterized in that mechanical connection is achieved through a heat joint method.

Description

technical field

[0001] The invention relates to a rotor arrangement and a method for producing a rotor arrangement. Background technique

[0002] Vacuum pumps, such as turbomolecular pumps, are used in various technical fields in order to provide the vacuum required for the respective process. A turbomolecular pump typically includes a rotor shaft, a plurality of rotor disks connected to the rotor shaft, and stator disks arranged between the rotor disks. In this case, the rotor disk and the stator disk each have blades, which are also referred to as vanes. The paddles form a pumpaktiv structure and create the desired pumping action when the rotor arrangement turns rapidly relative to the stator arrangement.

[0003] It is known from the prior art that the rotor arrangement of a turbomolecular pump is cut from a single component or is joined together from a plurality of individual rotor disks. In this case, the one-piece production is very time-consuming and production-int...

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