Two-dimensional position optical measurement system based on multi-linear-array CCD parallel splicing

Abstract

The invention provides a two-dimensional position optical measurement system based on multi-linear-array CCD parallel splicing. The system is composed of a light source cooperative target, a shared objective lens, a light splitter lens group and a linear array CCD group. The light splitter lens group includes a plurality of light splitters arranged on an output path of the shared objective lens successively. The linear array CCD group includes a plurality of linear-array CCDs corresponding to the light splitters one by one; the linear-array CCDs and the light source cooperative target conjugate respectively by the respective light paths; a photosensitive surface of each linear-array CCD is located at a YOZ plane of a rectangular coordinate system and a photosensitive length direction is parallel to an OZ axis. During measurement, a to-be-measured object is fixedly connected with the light source cooperative target; the light source cooperative target carries out imaging on the linear array CCD group by the shared objective lens and light splitter lens group; and two-dimensional position measurement of the light source cooperative target is completed jointly by a first linear-array CCD, a second linear-array CCD, a third linear-array CCD, ... , and an Nth linear-array CCD. The provided system has advantages of low cost and high precision.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and designs a two-dimensional position optical measurement system based on multi-line array CCD parallel splicing. Background technique [0002] Due to the large number of single-dimensional pixels of the area array CCD, the area array CCD is often used for measurement in the two-dimensional position measurement with high precision and large range, but the price of this optical system is relatively expensive. Compared with the area array CCD, the price of the line array CCD is relatively low, and the number of one-dimensional pixels can be made a lot, while the total number of pixels is less than that of the area array CCD, the pixel size is more flexible, and the frame rate per second is high. , so the linear array CCD is often used for position measurement of one-dimensional dynamic targets. Contents of the invention [0003] The technical problem to be solved by the present inve...

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