Supporting platform, chip bonding method and device
A support platform and chip technology, applied in the direction of electrical components, electrical solid devices, semiconductor/solid device manufacturing, etc., to achieve the effect of binding
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Embodiment 1
[0045] This embodiment provides a support table for supporting a base substrate, the base substrate includes a second area on which a circuit board to be bound is attached and a first area other than the second area, the support Desks include:
[0046] Corresponding to the first supporting portion of the first region, the supporting surface of the first supporting portion can be in contact with the first region to support the base substrate;
[0047] Corresponding to the second support part in the second area, the second support part can move relative to the first support part so as to switch between the first state and the second state, wherein, in the first state , the supporting surface of the second supporting part and the supporting surface of the first supporting part are located on different planes, and in the second state, the supporting surface of the second supporting part and the supporting surface of the first supporting part faces lie on the same plane.
[0048]...
Embodiment 2
[0056] This embodiment provides a chip bonding device, including the above-mentioned supporting platform.
[0057] Further, the device also includes:
[0058] A joint tool located above the support table and corresponding to the second area, the area of the contact surface of the joint tool used to contact the circuit board to be bound is not less than the area of the second area, so that when performing COG pressure , the connector tool is able to apply sufficient pressure to the board to be bonded.
[0059] Further, the device also includes:
[0060] The temperature control module is used to control the first support part to be at a first preset temperature and control the second support part to be at a second preset temperature when the chip fixed on the glass substrate is pressed, wherein the first The first preset temperature is lower than the hardening temperature of the anisotropic conductive adhesive, and the second preset temperature is not lower than the harden...
Embodiment 3
[0065] This embodiment provides a chip binding method, which is applied to the above-mentioned chip binding device, and the method includes:
[0066] controlling the second supporting part to be in the first state, controlling the first supporting part to be at a first preset temperature at the same time, controlling the second supporting part to be at a second preset temperature, wherein the first preset temperature is lower than The hardening temperature of the anisotropic conductive adhesive, the second preset temperature is not lower than the hardening temperature of the anisotropic conductive adhesive;
[0067] placing the base substrate attached with the circuit board to be bound on the first supporting part;
[0068] Controlling the connector tool to move downward until the contact surface contacts the circuit board to be bound, and simultaneously controlling the second support part to move upward until the support surface of the second support part contacts the base su...
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