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a vacuum furnace

A technology of vacuum furnaces and vacuum chambers, applied in furnaces, muffle furnaces, cooking furnaces, etc., can solve the problem that heating components will contaminate workpieces, etc., and achieve the effect of rapid cooling

Inactive Publication Date: 2018-04-10
CHENGDU CVAC VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides a vacuum furnace to solve the technical problem that the heating components will pollute the workpiece during the heating process of the existing vacuum furnace

Method used

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Embodiment Construction

[0034] In order to make those skilled in the technical field of the application understand the application more clearly, the technical solution of the application will be described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0035] In an embodiment of the present invention, a vacuum furnace is provided. The main purpose of the vacuum furnace of the present invention is to rapidly heat the workpiece in a high vacuum state, perform vacuum degassing, vacuum annealing and other processes, and quickly cool down to normal temperature after the treatment is completed, and load and take the workpiece in a vacuum glove box.

[0036] See below figure 1 , specifically introduce the structure of the vacuum furnace.

[0037] The structure of the vacuum furnace adopts a double vacuum structure, and the vacuum furnace specifically includes: a first vacuum chamber 1 and a second vacuum chamber 2 .

[0038] The first vacuum chamber 1 is fixed...

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Abstract

The invention discloses a vacuum furnace. The vacuum furnace comprises a first vacuum chamber fixed on a sidewall of an operation box, a second vacuum chamber fixed on the sidewall of the operation box, and a chamber cover used for covering the second vacuum chamber, wherein the second vacuum chamber is accommodated in the first vacuum chamber; a carrying table is arranged in the second vacuum chamber, and a workpiece is placed on the carrying table; and an airtight heating chamber covers the outer wall of the second vacuum chamber, heating assemblies are arranged in the heating chamber, and the heating assemblies are sequentially arrayed along the outer wall of the second vacuum chamber, and used for heating the second vacuum chamber. The structure is capable of differentiating the heating assemblies from the workpiece, and then avoiding pollution of the heating assemblies to the workpiece, thus improving the quality of the workpiece.

Description

technical field [0001] The present application relates to a vacuum device, in particular to a vacuum furnace. Background technique [0002] With the continuous development of science and technology, vacuum technology has also developed rapidly, and there are more and more types of vacuum equipment, and people have also enjoyed various conveniences brought by vacuum technology. [0003] In the current vacuum furnace, a vacuum chamber is generally provided, and a workpiece is placed inside the vacuum chamber. The existing technology is to directly use a heating element to heat the workpiece in the vacuum chamber, so that the heating element will pollute the workpiece and reduce the The quality of the workpiece. Contents of the invention [0004] The invention provides a vacuum furnace to solve the technical problem that the heating components will pollute the workpiece during the heating process of the existing vacuum furnace. [0005] In order to solve the above technical...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F27B5/05F27B5/02F27B5/06F27B5/14F27B5/16
CPCF27B5/02F27B5/04F27B5/06F27B5/14F27B5/16F27B2005/062F27B2005/165F27B2005/166
Inventor 向勇傅绍英杨小军
Owner CHENGDU CVAC VACUUM TECH CO LTD