Composite polishing machine tool and polishing method

Abstract

The invention provides a polishing complex machine tool and a polishing method. The polishing complex machine tool comprises a motion platform, a circulating system, a magneto-rheological polishing device, a jet flow polishing device and a controller. An optical element is installed on the motion platform and is driven by the motion platform to move on the horizontal plane. The magneto-rheological polishing device or the jet flow polishing device is controlled by the controller for conducting polishing on the surface of the optical element. The circulating system provides a polishing solution A for the magneto-rheological polishing device, and provides a polishing solution B or water for the jet flow polishing device. The controller is used for controlling the movement of the motion platform and the work sequence of the magneto-rheological polishing device and the jet flow polishing device. The advantages of the two methods of magneto-rheological polishing and jet flow polishing are combined for the polishing complex machine tool provided by the invention, a multilevel polishing method or a polishing and cleaning combined processing method can be achieved, and the problems that an existing single polishing device is limited in processing capability, and mounting and dismounting and adjustment are too frequent and scratching and pollution can be easily caused since processing is conducted on two machine tools correspondingly are solved.

Description

technical field [0001] The invention belongs to the field of ultra-precision machining of optical elements, and in particular relates to a polishing composite machine tool and a polishing method. Background technique [0002] Magneto-rheological polishing is an important ultra-precision machining method for optical components. It has the advantages of high processing efficiency and small sub-surface damage, but it is difficult to process aspheric workpieces, especially high-steep aspheric surfaces. At the same time, the workpiece after processing It is easy to embed polishing particles in it. Jet polishing is another ultra-precision polishing method, which has the advantages of high surface accuracy, high-steep curved surfaces, and the ability to clean the workpiece surface. [0003] For the magnetorheological polishing technology, the Chinese patent literature library has published the invention patent CN 101323097A, which discloses a complete magnetorheological polishing ...

AI Technical Summary

Problems solved by technology

However, there is only a technical solution for a single machine tool in the prior art. If processing is performed on two machine tools separately, there will be problems such as frequent loading, unloading and debugging, and easy scratching and contamination of the workpiece.

Integrating the two polishing methods is a new solution, but in the process of integration, it is necessary to solve the technical problems of compound motion, integration of circulatory system, and matching of compound processing methods. At present, there is no such thing as a combination of magnetorheology and jet flow. Relevant public patents related to the composite and integration of two polishing methods

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