Film thickness detection device
A detection device and film thickness technology, applied in the authenticity inspection of banknotes, instruments, handling coins or valuable banknotes, etc., can solve the problem of large detection structure, achieve the effect of improving resolution, improving detection accuracy, and convenient use
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Embodiment 1
[0070] The detection chip in the detection device is formed by a structural film layer, such as figure 2 As shown, its structural film layers include a substrate 101 , an oxide insulating layer (first insulating layer 102 ), a second insulating layer 103 , a third insulating layer 104 , a detection electrode 11 and a protective layer 108 from bottom to top. And the detection electrode 11 is an aluminum electrode. The structure of the detection electrode 11 is a detection electrode 11 structure with the largest area under a fixed resolution.
Embodiment 2
[0072] Such as image 3 and Figure 4 As shown, the structural film layers include a substrate 101 , an oxide insulating layer (first insulating layer 102 ), a second insulating layer 103 , a third insulating layer 104 , a detection electrode 11 and a protective layer 108 from bottom to top. And the detection electrode 11 is an aluminum electrode. And the detection electrode 11 is a narrow strip electrode. Due to the small area of this type of detection electrode 11 , its parasitic capacity is small, and the voltage reset speed on the detection electrode 11 is very fast during high-speed scanning.
Embodiment 3
[0074] Such as Figure 5 and Figure 6 As shown, the structural film layers include a substrate 101 , an oxide insulating layer (first insulating layer 102 ), a second insulating layer 103 , a third insulating layer 104 , a detection electrode 11 and a protective layer 108 from bottom to top. And the detection electrode 11 includes a plurality of top electrodes 107 and a bottom electrode area 105, and the top electrodes 107 are aluminum electrodes. And the top electrode 107 is a narrow strip electrode. Wherein, the bottom electrode region 105 is disposed in the third insulating layer 104, and a plurality of via holes 106 are opened along the same second direction on the surface of the third insulating layer 104 far away from the second insulating layer 103, and each via hole 106 Both are provided with a top electrode 107 . Such as Figure 5 As shown, each detection electrode 11 of this structure includes a plurality of narrow strip electrodes, which increases the contact a...
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