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Film thickness detection device

A detection device and film thickness technology, applied in the authenticity inspection of banknotes, instruments, handling coins or valuable banknotes, etc., can solve the problem of large detection structure, achieve the effect of improving resolution, improving detection accuracy, and convenient use

Active Publication Date: 2019-04-09
WEIHAI HUALING OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The main purpose of this application is to provide a film thickness detection device to solve the problem of large detection structures in the prior art

Method used

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  • Film thickness detection device

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0070] The detection chip in the detection device is formed by a structural film layer, such as figure 2 As shown, its structural film layers include a substrate 101 , an oxide insulating layer (first insulating layer 102 ), a second insulating layer 103 , a third insulating layer 104 , a detection electrode 11 and a protective layer 108 from bottom to top. And the detection electrode 11 is an aluminum electrode. The structure of the detection electrode 11 is a detection electrode 11 structure with the largest area under a fixed resolution.

Embodiment 2

[0072] Such as image 3 and Figure 4 As shown, the structural film layers include a substrate 101 , an oxide insulating layer (first insulating layer 102 ), a second insulating layer 103 , a third insulating layer 104 , a detection electrode 11 and a protective layer 108 from bottom to top. And the detection electrode 11 is an aluminum electrode. And the detection electrode 11 is a narrow strip electrode. Due to the small area of ​​this type of detection electrode 11 , its parasitic capacity is small, and the voltage reset speed on the detection electrode 11 is very fast during high-speed scanning.

Embodiment 3

[0074] Such as Figure 5 and Figure 6 As shown, the structural film layers include a substrate 101 , an oxide insulating layer (first insulating layer 102 ), a second insulating layer 103 , a third insulating layer 104 , a detection electrode 11 and a protective layer 108 from bottom to top. And the detection electrode 11 includes a plurality of top electrodes 107 and a bottom electrode area 105, and the top electrodes 107 are aluminum electrodes. And the top electrode 107 is a narrow strip electrode. Wherein, the bottom electrode region 105 is disposed in the third insulating layer 104, and a plurality of via holes 106 are opened along the same second direction on the surface of the third insulating layer 104 far away from the second insulating layer 103, and each via hole 106 Both are provided with a top electrode 107 . Such as Figure 5 As shown, each detection electrode 11 of this structure includes a plurality of narrow strip electrodes, which increases the contact a...

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Abstract

The invention provides a device for detecting film thickness. The detection device comprises a common electrode and a detection chip, the detection chip comprises: a detection electrode array and a detection circuit, wherein the detection electrode array is opposite with the common electrode and arranged with intervals in a first direction, and the detection electrode array comprises a plurality of detection electrodes arranged in sequence, the intervals between the common electrode and the detection electrodes form a transmission channel of a to-be-detected film, and the detection circuit is electrically connected with the detection electrode array and is used for detecting an induction electric signal of detection electrodes; the detection chip is formed by a structure film layer which comprises a base plate and an insulation film, the base plate is arranged on the surface of the base plate, the insulation film comprises a first insulation layer which contacts the base plate, the first insulation layer is an oxidation insulation layer, and the detection electrode array is arranged on the surface of the insulation film far away from the base plate. The detection device is convenient to use and has high detection precision.

Description

technical field [0001] The present application relates to the field of film thickness detection, in particular, to a film thickness detection device. Background technique [0002] In the financial field, banknote detectors, ATM machines and sorting machines identify and screen the authenticity of banknotes in various ways, and many of them identify the authenticity of banknotes by detecting the thickness of banknotes. The detection of the thickness of banknotes mostly adopts the detection method of the pressure roller, that is, when the banknote passes the pressure roller, the gap between the pressure rollers is measured, and then the thickness of the banknote is judged through the gap. This detection method has the defects of large detection structure and low detection accuracy. Contents of the invention [0003] The main purpose of the present application is to provide a film thickness detection device to solve the problem of bulky detection structures in the prior art....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G07D7/164G07D7/026
CPCG07D7/026G07D7/164
Inventor 林永辉韩晓伟戴朋飞
Owner WEIHAI HUALING OPTO ELECTRONICS CO LTD