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An image processing method for automatic recognition of carbon nanotubes based on sem

An image processing and carbon nanotube technology, which is applied in the image processing field of CNT automatic recognition in extreme environments, can solve the problems of low magnification, poor algorithm environment adaptability, long operation cycle, operation level and skill requirements, etc.

Active Publication Date: 2019-10-15
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

Therefore, the identification and operation method of nanomaterials such as CNT is particularly important. The operation method of CNT can be divided into two types: non-robot operation and robot operation. The former can quickly and efficiently separate and sort CNT, but the disadvantage is that it is difficult to single Root CNT to operate
The latter can be further divided into teleoperation method and automation method. For the teleoperation method, it has the characteristics of long operation period and relatively high requirements on the operating level and skills of the staff, while the automation method has a low magnification and can only be used for diameter d = Inadequacies such as the operation of nanomaterials above 50nm, and poor adaptability of the algorithm to the environment

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  • An image processing method for automatic recognition of carbon nanotubes based on sem
  • An image processing method for automatic recognition of carbon nanotubes based on sem
  • An image processing method for automatic recognition of carbon nanotubes based on sem

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Embodiment Construction

[0024] See attached figure 1 , an image processing method based on SEM for automatic identification of carbon nanotubes on the x-y plane in an extreme environment, which processes object images including: probes (1), CNTs (2), and CNT growth substrates (3).

[0025] The processing flow of the method includes: graying the image; color normalization and binarization; contour gradient calculation; extremum point extraction; and five image processing steps of optimization.

[0026] In the image processing flow of the automatic recognition of the target CNT, the algorithm automatically normalizes the color of the image, in order to cope with the difference in the background brightness of the image caused by the magnification or the change in illumination, the method proposed by the present invention is : Calculate the histogram of the pixel values ​​of the image. According to the characteristics of the image, the partition containing the largest number of pixel values, that is, con...

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Abstract

The invention provides an image processing method for automatic identification of carbon nanotubes based on SEM (scanning electron microscope). In this method, after the images of the probe (1) and CNT (2) are obtained by SEM, five image processing steps are performed on the image, including grayscale, color normalization, contour gradient calculation, extreme point extraction, and optimization processing, so that One or several long and straight target CNTs with few impurities can be screened out from all identified CNTs at the edge of the substrate (3). The image processing method proposed by the invention has the advantages of strong robustness, strong environmental adaptability, simple algorithm structure, fast calculation and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-nano operation, and in particular relates to an image processing method for automatic recognition of CNTs (carbon nanotubes) in extreme environments based on SEM. Background technique [0002] Nanomaterials, such as fullerenes, CNTs, graphene, etc., have been widely used in manufacturing, microelectronics, biology, medicine, energy and other fields. Taking CNT as an example, it is used in various nanodevices due to its unique mechanical, electrical and thermal properties. Therefore, the identification and operation method of nanomaterials such as CNT is particularly important. The operation method of CNT can be divided into two types: non-robot operation and robot operation. The former can quickly and efficiently separate and sort CNT, but the disadvantage is that it is difficult to single Operate with root CNT. The latter can be further divided into teleoperation method and automation method. For...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06K9/46G06K9/60
CPCG06V10/44G06V10/50G06V10/56G06V10/20G06V2201/122
Inventor 石青王化平郭亚娜孙韬黄强福田敏男
Owner BEIJING INSTITUTE OF TECHNOLOGYGY