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Sorter for semiconductor component testing
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A component testing and semiconductor technology, which is applied in the field of sorting machines, can solve the problems of reduced operating rate and processing capacity, longer standby time of sorting machines, etc., and achieve the effect of increasing operating rate and processing capacity and reducing standby time
Active Publication Date: 2018-09-25
TECHWING CO LTD
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At this time, since it takes about 2 hours to increase the internal temperature of the soaking chamber 140 from -40 degrees to 90 degrees, the standby time of the sorter becomes longer, which reduces the operating rate and processing capacity.
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no. 1 example
[0053] figure 2 is a schematic plan view of a sorter for semiconductor element testing (hereinafter, simply referred to as a "handler") 200 according to a first embodiment of the present invention.
[0054] like figure 2 As shown, the sorting machine 200 according to this embodiment includes a test tray 210, a loading device 220, an unloading device 230, a first posture changer 240, a first chamber 250, a second chamber 260, a test chamber 270, an auxiliary Chamber AC, pressurizing device 280, second posture changer 290, multiple transfer units TF 1 to TF 9 , multiple thermostats TC 1 to TC 7 and the controller CU.
[0055] The test tray 210 moves along the first circulation path C according to the test temperature condition 1 (refer to image 3 ) to circulate or along the second circulation path C 2 (refer to Figure 4 ) to loop. Among them, the first cycle path C 1 is a closed path that joins to the loading position LP via the loading position LP, the interior o...
no. 2 example
[0095] Figure 10 is a schematic plan view of a sorting machine 900 according to a second embodiment of the present invention.
[0096] like Figure 10 As shown, the sorting machine 900 according to this embodiment includes: a test tray 910, a component moving part DTP, a first posture changer 940, a first chamber 950, a second chamber 960, a test chamber 970, and a pressurizing device 980, the second posture changer 990, multiple transfer devices TF 1 to TF 7 , multiple thermostats TC 1 to TC 6 and the controller CU.
[0097] The test tray 910 moves along the first circulation path C according to the test temperature condition 1 (refer to Figure 11 ) cycle or along the second cycle path C 2 (refer to Figure 12 )cycle. The first cycle path C 1 is via the first position P 1 , the interior of the first chamber 950, the test position TP in the interior of the test chamber 970, the interior of the second chamber 960, and the second position P 2 while connected to th...
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Abstract
The invention discloses a sorting machine for testing semiconductor components, which is used when testing produced semiconductor components. The sorter for semiconductor element testing according to the present invention has a test chamber provided between the first chamber and the second chamber on the circulation path of the test tray, and the first chamber can be used as a soaking chamber or a soaking chamber The function of the second chamber can be realized along with the function conversion of the first chamber, so as to function as a retreat soaking chamber or a soaking chamber. Also, the test tray circulates by selecting one of two different circulation paths. Therefore, even when the test temperature conditions are significantly changed, the operation rate and processing capacity of the sorter are improved because the standby time of the sorter is greatly shortened.
Description
technical field [0001] The invention relates to a sorting machine used for testing produced semiconductor elements. Background technique [0002] Sorters are used when testing semiconductor devices manufactured through a predetermined manufacturing process. [0003] The sorting machine moves the semiconductor components from the customer tray (Customer Tray) to the test tray (Test Tray), and provides support so that the semiconductor components carried in the test tray can be tested (Test) by the tester (Tester) at the same time, and based on The semiconductor components are sorted by grade according to the test results, and the semiconductor components are moved from the test tray to the customer tray. [0004] The above-mentioned test tray circulates in a predetermined circulation path connected by the following positions: the position where the semiconductor element is loaded (Loaded) on the test tray (hereinafter referred to as "loading position"), the semiconductor ele...
Claims
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Application Information
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