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Scanned image identification method and apparatus

A technology for scanning images and images, applied in the field of scanning image recognition, to achieve the effects of reducing time-consuming and labor costs, real-time recognition, and improving efficiency

Inactive Publication Date: 2016-12-21
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Description
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Problems solved by technology

[0005] The problem solved by the present invention is how to reduce the time-consuming and labor cost of image recognition

Method used

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  • Scanned image identification method and apparatus
  • Scanned image identification method and apparatus
  • Scanned image identification method and apparatus

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Embodiment Construction

[0025] Scanning Electron Microscope (SEM) is a relatively modern cell biology research tool invented in 1965. It mainly uses secondary electron signal imaging to obtain surface morphology information of samples, that is, to use a very narrow electron beam to Scanning the sample, the interaction between the electron beam and the sample produces various electron emissions, mainly the secondary electron emission of the sample, and the secondary electron can produce an enlarged topography image of the sample surface, so it can be obtained by point-by-point imaging method A magnified image of the sample surface.

[0026] Due to the high accuracy of SEM and based on the specific measurement requirements in the semiconductor field, one of the SEMs, the CD Scanning Electron Microscope (CD-SEM), has been used for many years to test wafers. Critical Dimension (CD). After a number of processing processes, the wafer can be made into a product that meets the requirements, and once any pro...

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Abstract

The invention relates to a scanned image identification method and apparatus. The method comprises: a to-be-identified scanned image is obtained; feature information of the to-be-identified scanned image is calculated; the feature information of the to-be-identified scanned image is compared with preset feature information to obtain a comparison result; and according to the comparison result, whether the to-be-identified scanned image is abnormal is identified and an identification result is outputted to a user. According to the technical scheme, time consumed by image identification can be reduced and the labor cost can be lowered.

Description

technical field [0001] The invention relates to the field of image processing, in particular to a scanning image recognition method and device. Background technique [0002] Scanning Electron Microscope (SEM) is a relatively modern cell biology research tool invented in 1965. It mainly uses secondary electron signal imaging to obtain surface morphology information of samples, that is, to use a very narrow electron beam to Scanning the sample, the interaction between the electron beam and the sample produces various electron emissions, mainly the secondary electron emission of the sample, and the secondary electron can produce an enlarged topography image of the sample surface, so it can be obtained by point-by-point imaging method A magnified image of the sample surface. Due to the high accuracy of SEM and based on the specific measurement requirements in the semiconductor field, one of the SEMs, the CD Scanning Electron Microscope (CD-SEM), has been used for many years to ...

Claims

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Application Information

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IPC IPC(8): G06K9/62
CPCG06F18/22
Inventor 姜国伟章屠灵顾硕峰
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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