scoring device
A technology for scribing lines and substrates, applied in the field of scribing devices, can solve problems such as troublesome alignment operations, and achieve the effect of efficient and high-precision scribing
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0032] Hereinafter, the present invention will be described in detail based on the embodiments shown in the drawings. The circular substrate to be scribed in this embodiment is a semiconductor substrate W for an image sensor in which a glass wafer and a silicon wafer are laminated. Such as figure 2 As shown, chips including electronic components such as circuits are arranged in a grid pattern on the semiconductor substrate W, and lines in the X-Y direction that divide these chips form predetermined scribing lines (scribing lanes) S1 and S2 . Moreover, on any one of the predetermined scribe lines passing through the center point P of the semiconductor substrate W, in this embodiment, on the predetermined scribe line S1, and on the edge of the semiconductor substrate W, a notch or a positioning plane is provided as a mark. The incision part K.
[0033] figure 1 (a) and (b) show an embodiment of the scribing apparatus A of the present invention, which includes a stage 1 on w...
PUM
![No PUM](https://static-eureka.patsnap.com/ssr/23.2.0/_nuxt/noPUMSmall.5c5f49c7.png)
Abstract
Description
Claims
Application Information
![application no application](https://static-eureka.patsnap.com/ssr/23.2.0/_nuxt/application.06fe782c.png)
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap