A processing method and device for process parameters
A technology of process parameters and processing methods, applied in the direction of digital control, electrical program control, etc., can solve the problems of high requirements for implementers, low modification efficiency, and heavy workload, so as to reduce risks, reduce operations, and improve processing efficiency. Effect
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Embodiment 1
[0046] refer to figure 1 , which shows a flow chart of the steps of Embodiment 1 of a process parameter processing method of the present invention, which may specifically include:
[0047] Step 101, when it is detected that the first configuration file of the recipe template has changed, according to the second configuration file identifier of the existing recipe recorded in the first configuration file, search for the second configuration file of the existing recipe;
[0048]At present, in the field of semiconductor integrated circuits, due to the higher and higher processing precision, the process has become more and more complex, and a recipe contains more and more information, and the recipe parameters that need to be modified and added will continue to increase. After modifying the first configuration file of the recipe template, it is necessary to modify the second configuration files of all existing recipes corresponding to the recipe template. Specifically, a recipe t...
Embodiment 2
[0095] refer to figure 2 , which shows a flow chart of steps in Embodiment 2 of a process parameter processing method of the present invention, which may specifically include:
[0096] Step 201, when it is detected that the first configuration file of the recipe template has changed, according to the first configuration file, obtain the first parameter list of the recipe template;
[0097] Specifically, the RecipeExecutor node in the first configuration file corresponding to the recipe template is stored in the first container L1 in units of Param, that is, all the first parameter information in the first parameter list is stored in L1 in order, and the Specifically, the first container L1 may be a list List. In practical applications, other storage structures may be used besides the List, and the present invention does not limit the storage structure.
[0098] Step 202, according to the second configuration file identifier of the existing Recipe recorded in the first confi...
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