Unlock instant, AI-driven research and patent intelligence for your innovation.

Perpendicular cavity surface laser and manufacturing method therefor

A vertical cavity surface and laser technology, applied in the field of lasers, can solve problems such as simple system process, achieve good repeatability, alleviate multi-mode and scattering problems, and be easy to popularize.

Active Publication Date: 2017-05-10
GUANGXUN SCI & TECH WUHAN +1
View PDF3 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, looking at various types of grating-modulated vertical emitting lasers, there is no systematic and simple solution

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Perpendicular cavity surface laser and manufacturing method therefor
  • Perpendicular cavity surface laser and manufacturing method therefor
  • Perpendicular cavity surface laser and manufacturing method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Embodiment 1 of the present invention provides a vertical cavity surface laser, such as Figure 1-2As shown, a substrate 1, an N-type distributed Bragg mirror group 2, an active region 3, an oxidation confinement layer 4, a P surface electrode 5, an optical film 6, a second grating layer 7 and a BCB passivation layer 8; the N Type distributed Bragg reflector group 2, active region 3, oxidation confinement layer 4, P surface electrode 5, optical film 6, second grating layer 7 and BCB passivation layer 8 are stacked in sequence and located on the substrate 1; Wherein, the oxidation limiting layer 4 is provided with a first grating; the light emitting surface of the optical film 6 is etched with a second grating 7 .

[0045] The embodiment of the present invention realizes the anisotropic injection of the current in the active region through the introduction of the first grating formed by oxidation, and effectively alleviates various problems caused by the isotropic carrie...

Embodiment 2

[0053] The embodiment of the present invention is based on the structure of the vertical cavity surface laser described in Embodiment 1, and a specific implementation method is proposed. In this embodiment, the first grating is a strip grating, and the second grating is a ring grating , wherein the strip grating is composed of parallel and alternately oxidized conductive strip-shaped regions and non-conductive strip-shaped regions. then as Figure 1-2 As shown, the vertical cavity surface laser structure substrate 1, N-type distributed Bragg reflector group 2, active region 3, oxidation confinement layer 4, P-surface electrode 5, P-type distributed Bragg reflector group 6, second grating Layer 7 and BCB passivation layer 8; said N-type distributed Bragg mirror group 2, active region 3, oxidation confinement layer 4, P-face electrode 5, P-type distributed Bragg mirror group 6, second grating layer 7 and The BCB passivation layer 8 is sequentially stacked and located on the sub...

Embodiment 3

[0056] The embodiment of the present invention is based on the structure of the vertical cavity surface laser described in Embodiment 1, and a specific implementation method is proposed. In this embodiment, the first grating is a ring grating, and the second grating is a strip grating , wherein the annular grating is composed of concentric rings alternately oxidized into conductive strip-shaped regions and non-conductive strip-shaped regions. then as Figure 1-2 As shown, the vertical cavity surface laser structure substrate 1, N-type distributed Bragg reflector group 2, active region 3, oxidation confinement layer 4, P-surface electrode 5, P-type distributed Bragg reflector group 6, second grating Layer 7 and BCB passivation layer 8; said N-type distributed Bragg mirror group 2, active region 3, oxidation confinement layer 4, P-face electrode 5, P-type distributed Bragg mirror group 6, second grating layer 7 and The BCB passivation layer 8 is sequentially stacked and located...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the technical field of a laser, and provides a perpendicular cavity surface laser and a manufacturing method therefor. The laser consists of a substrate 1, an N type distributed bragg reflection mirror group 2, an active region 3, an oxidization limiting layer 4, a P surface electrode 5, an optical film 6, a second optical grating layer 7 and a BCB passivation layer 8, wherein a first optical grating formed by oxidization is arranged on the oxidization limiting layer 4; and a second optical grating is etched on the light emission surface of a P type distributed bragg reflection mirror group 6. According to the embodiments, by virtue of the introduction of the first optical grating formed by oxidization, anisotropic injection of the active region current is realized, so that various problems caused by isotropy of carrier injection can be effectively relieved, such as a space hole-burning phenomenon and the like; and meanwhile, by virtue of the introduction of the second optical grating, the multimode and scattering problems of the output light can be further relieved to realize radial self-focusing polarized light output.

Description

[0001] 【Technical field】 [0002] The invention relates to the technical field of lasers, in particular to a vertical cavity surface laser and a manufacturing method thereof. [0003] 【Background technique】 [0004] The high power, single longitudinal mode, circular output spot, long life and easy two-dimensional integration of vertical cavity surface emitting lasers make the commercial application of high power vertical cavity surface emitting lasers more and more extensive, especially in the field of telecommunications, Laser display field, laser ignition, pump source and laser processing, etc. After decades of unremitting efforts all over the world, the VCSEL market is becoming bigger and bigger. The shortcomings of high-power vertical-cavity surface-emitting lasers, such as high threshold current and low photoelectric conversion efficiency, have been well improved. For a long time, the vertical cavity surface emitting semiconductor laser (Vertical Cavity Surface Emitting ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01S5/183
CPCH01S5/18313
Inventor 姜勋财王任凡汤宝罗飙余兵朱拓吴振华
Owner GUANGXUN SCI & TECH WUHAN